Assignee
NAGAI SHINJI
JP·11 granted patents·4 pending applications·45 citations·filing 2007–2012
Top patents by PatentIndex Score
15 records- 0191US8872142B2Extreme ultraviolet light generation apparatusNAGAI SHINJI·Filed 2012·Granted Oct 28, 2014·9 cites·40 claims
- 0288US8530869B2Extreme ultraviolet light source apparatusNAGAI SHINJI·Filed 2011·Granted Sep 10, 2013·7 cites·22 claims
- 0385US8242474B2Extreme ultraviolet light generation apparatusNAGAI SHINJI·Filed 2011·Granted Aug 14, 2012·6 cites·25 claims
- 0483US8624208B2Extreme ultraviolet light generation systemNAGAI SHINJI·Filed 2011·Granted Jan 7, 2014·8 cites·26 claims
- 0579US8629417B2Extreme ultraviolet light generation apparatusNAGAI SHINJI·Filed 2012·Granted Jan 14, 2014·4 cites·13 claims
- 0678US8569723B2Extreme ultraviolet light source apparatusNAGAI SHINJI·Filed 2011·Granted Oct 29, 2013·4 cites·12 claims
- 0770US8503499B2Gas discharge chamberNAGAI SHINJI·Filed 2010·Granted Aug 6, 2013·2 cites·6 claims
- 0870US8165181B2Polarization purity control device and gas laser apparatus provided with the sameNAGAI SHINJI·Filed 2009·Granted Apr 24, 2012·2 cites·6 claims
- 0965US8891574B2Polarization purity control device and gas laser apparatus provided with the sameNAGAI SHINJI·Filed 2012·Granted Nov 18, 2014·1 cites·6 claims
- 1056US8748853B2Chamber apparatusNAGAI SHINJI·Filed 2012·Granted Jun 10, 2014·1 cites·8 claims
- 1155US8884257B2Chamber apparatus and extreme ultraviolet light generation systemNAGAI SHINJI·Filed 2012·Granted Nov 11, 2014·1 cites·9 claims
- 1253US2008037609A1Excimer laser deviceNAGAI SHINJI·Filed 2007·Application pending·0 cites
- 1350US2011164647A1Excimer laser deviceNAGAI SHINJI·Filed 2011·Application pending·0 cites
- 1439US2013161540A1Extreme ultraviolet light generation apparatusNAGAI SHINJI·Filed 2012·Application pending·0 cites
- 1537US2011253913A1Chamber apparatusNAGAI SHINJI·Filed 2011·Application pending·0 cites
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