Assignee
NAKANO KATSUSHI
JP·5 granted patents·1 pending application·5 citations·filing 2005–2011
Top patents by PatentIndex Score
6 records- 0169US8941808B2Immersion lithographic apparatus rinsing outer contour of substrate with immersion spaceNAKANO KATSUSHI·Filed 2008·Granted Jan 27, 2015·2 cites·20 claims
- 0265US8111374B2Analysis method, exposure method, and device manufacturing methodNAKANO KATSUSHI·Filed 2006·Granted Feb 7, 2012·2 cites·16 claims
- 0364US8514366B2Exposure method and apparatus, maintenance method and device manufacturing methodNAKANO KATSUSHI·Filed 2008·Granted Aug 20, 2013·1 cites·59 claims
- 0450US2012008112A1Substrate processing method, exposure apparatus, and method for producing device by immersing substrate in second liquid before immersion exposure through first liquidNAKANO KATSUSHI·Filed 2011·Application pending·0 cites
- 0546US8305553B2Exposure apparatus and device manufacturing methodNAKANO KATSUSHI·Filed 2005·Granted Nov 6, 2012·0 cites·58 claims
- 0644US8294873B2Exposure method, device manufacturing method, and substrateNAKANO KATSUSHI·Filed 2005·Granted Oct 23, 2012·0 cites·23 claims
Join the waitlist — get patent alerts
Get an alert when NAKANO KATSUSHI files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →