Assignee
NANGOY ROY C
US·4 granted patents·2 pending applications·90 citations·filing 2010–2014
Top patents by PatentIndex Score
6 records- 0195US9034771B1Cooling pedestal for dicing tape thermal management during plasma dicingNANGOY ROY C·Filed 2014·Granted May 19, 2015·35 cites·16 claims
- 0294US9196498B1Stationary actively-cooled shadow ring for heat dissipation in plasma chamberNANGOY ROY C·Filed 2014·Granted Nov 24, 2015·20 cites·4 claims
- 0394US9117868B1Bipolar electrostatic chuck for dicing tape thermal management during plasma dicingNANGOY ROY C·Filed 2014·Granted Aug 25, 2015·24 cites·5 claims
- 0490US8753474B2Method and apparatus for high efficiency gas dissociation in inductive couple plasma reactorNANGOY ROY C·Filed 2010·Granted Jun 17, 2014·11 cites·14 claims
- 0554US2011318997A1Apparatus and methods for conditioning a polishing padNANGOY ROY C·Filed 2011·Application pending·0 cites
- 0642US2012270477A1Measurement of pad thickness and control of conditioningNANGOY ROY C·Filed 2011·Application pending·0 cites
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Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →