US2011318997A1PendingUtilityA1

Apparatus and methods for conditioning a polishing pad

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Assignee: NANGOY ROY CPriority: Mar 13, 2006Filed: Jun 20, 2011Published: Dec 29, 2011
Est. expiryMar 13, 2026(expired)· nominal 20-yr term from priority
Inventors:Roy C. NangoyShou-Sung ChangDonald OlgadoHung Chih ChenGerald Alonzo
B24B 53/017B24B 53/005B24B 53/12
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Abstract

Apparatus and methods for conditioning a polishing pad include an arm adapted to support a conditioning disk; a drive mechanism coupled to the arm; and a flexible coupling between the drive mechanism and the conditioning disk adapted to allow the conditioning disk to tilt while transmitting rotary motion from the drive mechanism to the conditioning disk. Numerous other aspects are disclosed.

Claims

exact text as granted — not AI-modified
1 . A method for conditioning a polishing pad comprising:
 providing a drive mechanism having a rotary motion; and   transmitting the rotary motion to a conditioning disk via a flexible coupling that allows the conditioning disk to tilt while rotating the conditioning disk.

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