Inventor · disambiguated record
Hung Chih Chen
Also filed as: CHEN HUNG · CHEN HUNG C · CHEN HUNG CHIH · CHEN HUNG NAN
175 granted patents·42 pending applications·4,229 citations·filing 1985–2025
99Inventor score
Files withAPPLIED MATERIALS INC132CHEN HUNG-CHIH15WISTRON CORP14TAIWAN SEMICONDUCTOR MFG6TAIWAN SEMICONDUCTOR MFG CO LTD6
Top patents by PatentIndex Score
217 records- 0199US7166016B1Six headed carouselAPPLIED MATERIALS INC·Filed 2006·Granted Jan 23, 2007·47 cites·20 claims
- 0298US11260500B2Retaining ring with shaped surfaceAPPLIED MATERIALS INC·Filed 2020·Granted Mar 1, 2022·4 cites·9 claims
- 0398US7207871B1Carrier head with multiple chambersAPPLIED MATERIALS INC·Filed 2005·Granted Apr 24, 2007·53 cites·21 claims
- 0498US6183354B1Carrier head with a flexible membrane for a chemical mechanical polishing systemAPPLIED MATERIALS INC·Filed 1997·Granted Feb 6, 2001·276 cites·92 claims
- 0597US7198561B2Flexible membrane for multi-chamber carrier headAPPLIED MATERIALS INC·Filed 2005·Granted Apr 3, 2007·35 cites·16 claims
- 0697US6857945B1Multi-chamber carrier head with a flexible membraneAPPLIED MATERIALS INC·Filed 2000·Granted Feb 22, 2005·116 cites·27 claims
- 0797US6241596B1Method and apparatus for chemical mechanical polishing using a patterned padAPPLIED MATERIALS INC·Filed 2000·Granted Jun 5, 2001·101 cites·21 claims
- 0896US10766117B2Retaining ring with shaped surfaceAPPLIED MATERIALS INC·Filed 2018·Granted Sep 8, 2020·5 cites·3 claims
- 0996US8066551B2Retaining ring with shaped surfaceCHEN HUNG CHIH·Filed 2011·Granted Nov 29, 2011·14 cites·19 claims
- 1096US7241203B1Six headed carouselAPPLIED MATERIALS INC·Filed 2006·Granted Jul 10, 2007·26 cites·22 claims
- 1196US6722965B2Carrier head with flexible membranes to provide controllable pressure and loading areaAPPLIED MATERIALS INC·Filed 2001·Granted Apr 20, 2004·66 cites·17 claims
- 1296US6450868B1Carrier head with multi-part flexible membraneAPPLIED MATERIALS INC·Filed 2000·Granted Sep 17, 2002·67 cites·24 claims
- 1396US6361420B1Method of chemical mechanical polishing with edge controlAPPLIED MATERIALS INC·Filed 2000·Granted Mar 26, 2002·55 cites·3 claims
- 1496US6159079ACarrier head for chemical mechanical polishing a substrateAPPLIED MATERIALS INC·Filed 1998·Granted Dec 12, 2000·152 cites·26 claims
- 1596US5957751ACarrier head with a substrate detection mechanism for a chemical mechanical polishing systemAPPLIED MATERIALS INC·Filed 1997·Granted Sep 28, 1999·147 cites·38 claims
- 1695US10022837B2Inner retaining ring and outer retaining ring for carrier headAPPLIED MATERIALS INC·Filed 2015·Granted Jul 17, 2018·6 cites·7 claims
- 1795US9017138B2Retaining ring monitoring and control of pressureAPPLIED MATERIALS INC·Filed 2013·Granted Apr 28, 2015·14 cites·18 claims
- 1895US8721391B2Carrier head with narrow inner ring and wide outer ringCHEN HUNG CHIH·Filed 2011·Granted May 13, 2014·13 cites·17 claims
- 1995US8221193B2Closed loop control of pad profile based on metrology feedbackCHANG SHOU-SUNG·Filed 2008·Granted Jul 17, 2012·29 cites·20 claims
- 2095US8088299B2Multiple zone carrier head with flexible membraneCHEN HUNG CHIH·Filed 2010·Granted Jan 3, 2012·22 cites·13 claims
- 2195US7527271B2Fast substrate loading on polishing head without membrane inflation stepAPPLIED MATERIALS INC·Filed 2007·Granted May 5, 2009·32 cites·17 claims
- 2295US7459057B2Substrate retainerAPPLIED MATERIALS INC·Filed 2002·Granted Dec 2, 2008·38 cites·3 claims
- 2395US7255771B2Multiple zone carrier head with flexible membraneAPPLIED MATERIALS INC·Filed 2004·Granted Aug 14, 2007·82 cites·25 claims
- 2495US7101272B2Carrier head for thermal drift compensationAPPLIED MATERIALS INC·Filed 2005·Granted Sep 5, 2006·27 cites·37 claims
- 2595US7001257B2Multi-chamber carrier head with a flexible membraneAPPLIED MATERIALS INC·Filed 2005·Granted Feb 21, 2006·26 cites·15 claims
- 2695US6764387B1Control of a multi-chamber carrier headAPPLIED MATERIALS INC·Filed 2003·Granted Jul 20, 2004·58 cites·18 claims
- 2795US6436828B1Chemical mechanical polishing using magnetic forceAPPLIED MATERIALS INC·Filed 2000·Granted Aug 20, 2002·60 cites·16 claims
- 2895US6132298ACarrier head with edge control for chemical mechanical polishingAPPLIED MATERIALS INC·Filed 1998·Granted Oct 17, 2000·118 cites·32 claims
- 2995US6080050ACarrier head including a flexible membrane and a compliant backing member for a chemical mechanical polishing apparatusAPPLIED MATERIALS INC·Filed 1997·Granted Jun 27, 2000·125 cites·29 claims
- 3094US10500694B2Chemical mechanical polishing apparatus and methodsAPPLIED MATERIALS INC·Filed 2017·Granted Dec 10, 2019·7 cites·15 claims
- 3194US8585468B2Retaining ring with shaped surfaceCHEN HUNG CHIH·Filed 2011·Granted Nov 19, 2013·8 cites·5 claims
- 3294US7883397B2Substrate retainerAPPLIED MATERIALS INC·Filed 2008·Granted Feb 8, 2011·15 cites·21 claims
- 3394US7344434B2Retaining ring with shaped surfaceAPPLIED MATERIALS INC·Filed 2004·Granted Mar 18, 2008·33 cites·15 claims
- 3494US7044832B2Load cup for chemical mechanical polishingAPPLIED MATERIALS INC·Filed 2004·Granted May 16, 2006·61 cites·26 claims
- 3594US5993302ACarrier head with a removable retaining ring for a chemical mechanical polishing apparatusAPPLIED MATERIALS INC·Filed 1997·Granted Nov 30, 1999·120 cites·32 claims
- 3693US9067295B2Monitoring retaining ring thickness and pressure controlAPPLIED MATERIALS INC·Filed 2013·Granted Jun 30, 2015·13 cites·18 claims
- 3793US8808062B2Multi-chamber carrier head with a textured membraneAPPLIED MATERIALS INC·Filed 2013·Granted Aug 19, 2014·8 cites·14 claims
- 3893US6494774B1Carrier head with pressure transfer mechanismAPPLIED MATERIALS INC·Filed 2000·Granted Dec 17, 2002·47 cites·24 claims
- 3993US6210255B1Carrier head for chemical mechanical polishing a substrateAPPLIED MATERIALS INC·Filed 1999·Granted Apr 3, 2001·114 cites·28 claims
- 4093US6162116ACarrier head for chemical mechanical polishingAPPLIED MATERIALS INC·Filed 1999·Granted Dec 19, 2000·91 cites·7 claims
- 4193US4617607AHigh pressure capacitive transducerKAVLICO CORP·Filed 1985·Granted Oct 14, 1986·94 cites·18 claims
- 4292US7452264B2Pad cleaning methodAPPLIED MATERIALS INC·Filed 2006·Granted Nov 18, 2008·18 cites·9 claims
- 4392US7186171B2Composite retaining ringAPPLIED MATERIALS INC·Filed 2006·Granted Mar 6, 2007·17 cites·14 claims
- 4492US6146259ACarrier head with local pressure control for a chemical mechanical polishing apparatusAPPLIED MATERIALS INC·Filed 1997·Granted Nov 14, 2000·81 cites·28 claims
- 4591US7273408B2Paired pivot armAPPLIED MATERIALS INC·Filed 2006·Granted Sep 25, 2007·19 cites·5 claims
- 4691US6776694B2Methods for carrier head with multi-part flexible membraneAPPLIED MATERIALS INC·Filed 2002·Granted Aug 17, 2004·34 cites·18 claims
- 4791US6676497B1Vibration damping in a chemical mechanical polishing systemAPPLIED MATERIALS INC·Filed 2000·Granted Jan 13, 2004·33 cites·9 claims
- 4891US6406361B1Carrier head for chemical mechanical polishingAPPLIED MATERIALS INC·Filed 2000·Granted Jun 18, 2002·34 cites·16 claims
- 4991US6277014B1Carrier head with a flexible membrane for chemical mechanical polishingAPPLIED MATERIALS INC·Filed 1998·Granted Aug 21, 2001·93 cites·14 claims
- 5091US6050882ACarrier head to apply pressure to and retain a substrateAPPLIED MATERIALS INC·Filed 1999·Granted Apr 18, 2000·77 cites·15 claims
Showing the top 50 of 217 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →