Inventor · disambiguated record
Roy C. Nangoy
Also filed as: NANGOY ROY · NANGOY ROY C
17 granted patents·11 pending applications·230 citations·filing 2004–2024
94Inventor score
Top patents by PatentIndex Score
28 records- 0195US9034771B1Cooling pedestal for dicing tape thermal management during plasma dicingNANGOY ROY C·Filed 2014·Granted May 19, 2015·35 cites·16 claims
- 0294US9196498B1Stationary actively-cooled shadow ring for heat dissipation in plasma chamberNANGOY ROY C·Filed 2014·Granted Nov 24, 2015·20 cites·4 claims
- 0394US9117868B1Bipolar electrostatic chuck for dicing tape thermal management during plasma dicingNANGOY ROY C·Filed 2014·Granted Aug 25, 2015·24 cites·5 claims
- 0491US7433759B2Apparatus and methods for positioning wafersAPPLIED MATERIALS INC·Filed 2004·Granted Oct 7, 2008·60 cites·45 claims
- 0590US12459080B2Cleaning system for polishing liquid delivery armAPPLIED MATERIALS INC·Filed 2024·Granted Nov 4, 2025·0 cites·15 claims
- 0690US9681497B2Multi zone heating and cooling ESC for plasma process chamberAPPLIED MATERIALS INC·Filed 2014·Granted Jun 13, 2017·10 cites·12 claims
- 0790US8753474B2Method and apparatus for high efficiency gas dissociation in inductive couple plasma reactorNANGOY ROY C·Filed 2010·Granted Jun 17, 2014·11 cites·14 claims
- 0890US7155319B2Closed loop control on liquid delivery system ECP slim cellAPPLIED MATERIALS INC·Filed 2005·Granted Dec 26, 2006·25 cites·27 claims
- 0989US9162236B2Proportional and uniform controlled gas flow delivery for dry plasma etch apparatusAPPLIED MATERIALS INC·Filed 2013·Granted Oct 20, 2015·10 cites·20 claims
- 1089US7963826B2Apparatus and methods for conditioning a polishing padAPPLIED MATERIALS INC·Filed 2009·Granted Jun 21, 2011·9 cites·15 claims
- 1184US8096852B2In-situ performance prediction of pad conditioning disk by closed loop torque monitoringDESHPANDE SAMEER·Filed 2008·Granted Jan 17, 2012·14 cites·28 claims
- 1283US9305810B2Method and apparatus for fast gas exchange, fast gas switching, and programmable gas deliverySINGH SARAVJEET·Filed 2012·Granted Apr 5, 2016·6 cites·19 claims
- 1378US12240078B2Cleaning system for polishing liquid delivery armAPPLIED MATERIALS INC·Filed 2021·Granted Mar 4, 2025·0 cites·20 claims
- 1476US9488315B2Gas distribution apparatus for directional and proportional delivery of process gas to a process chamberAPPLIED MATERIALS INC·Filed 2014·Granted Nov 8, 2016·3 cites·18 claims
- 1566US9070633B2Method and apparatus for high efficiency gas dissociation in inductive coupled plasma reactorAPPLIED MATERIALS INC·Filed 2014·Granted Jun 30, 2015·1 cites·6 claims
- 1665US8920599B2High efficiency gas dissociation in inductively coupled plasma reactor with improved uniformityDINEV JIVKO·Filed 2011·Granted Dec 30, 2014·2 cites·13 claims
- 1755US2008156360A1Horizontal megasonic module for cleaning substratesAPPLIED MATERIALS INC·Filed 2007·Application pending·0 cites
- 1855US2009036035A1Apparatus and methods for conditioning a polishing padAPPLIED MATERIALS INC·Filed 2008·Application pending·0 cites
- 1955US2009036036A1Apparatus and methods for conditioning a polishing padAPPLIED MATERIALS INC·Filed 2008·Application pending·0 cites
- 2054US2011318997A1Apparatus and methods for conditioning a polishing padNANGOY ROY C·Filed 2011·Application pending·0 cites
- 2152US2007212983A1Apparatus and methods for conditioning a polishing padAPPLIED MATERIALS INC·Filed 2007·Application pending·0 cites
- 2247US2010041316A1Method for an improved chemical mechanical polishing systemWANG YULIN·Filed 2008·Application pending·0 cites
- 2346US2009272717A1Method and apparatus of a substrate etching system and processAPPLIED MATERIALS INC·Filed 2009·Application pending·0 cites
- 2444US11251047B2Clog detection in a multi-port fluid delivery systemAPPLIED MATERIALS INC·Filed 2018·Granted Feb 15, 2022·0 cites·22 claims
- 2544US2008011325A1Methods and apparatus for supporting a substrate in a horizontal orientation during cleaningOLGADO DONALD J·Filed 2007·Application pending·0 cites
- 2642US2012270477A1Measurement of pad thickness and control of conditioningNANGOY ROY C·Filed 2011·Application pending·0 cites
- 2742US2008156359A1Systems and methods for modular and configurable substrate cleaningOLGADO DONALD J K·Filed 2007·Application pending·0 cites
- 2838US2019070639A1Automatic cleaning machine for cleaning process kitsAPPLIED MATERIALS INC·Filed 2017·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →