Assignee
NISHII YASUFUMI
JP·6 granted patents·2 pending applications·118 citations·filing 2005–2012
Top patents by PatentIndex Score
8 records- 0197US9013675B2Liquid recovery system, immersion exposure apparatus, immersion exposing method, and device fabricating methodNISHII YASUFUMI·Filed 2012·Granted Apr 21, 2015·32 cites·18 claims
- 0297US8134685B2Liquid recovery system, immersion exposure apparatus, immersion exposing method, and device fabricating methodNISHII YASUFUMI·Filed 2008·Granted Mar 13, 2012·43 cites·67 claims
- 0394US8477283B2Exposure apparatus and device manufacturing methodNISHII YASUFUMI·Filed 2007·Granted Jul 2, 2013·26 cites·42 claims
- 0491US8233139B2Immersion system, exposure apparatus, exposing method, and device fabricating methodNISHII YASUFUMI·Filed 2009·Granted Jul 31, 2012·13 cites·27 claims
- 0578US9798245B2Exposure apparatus, and exposure method, with recovery device to recover liquid leaked from between substrate and memberNISHII YASUFUMI·Filed 2010·Granted Oct 24, 2017·2 cites·32 claims
- 0667US8300207B2Exposure apparatus, immersion system, exposing method, and device fabricating methodNISHII YASUFUMI·Filed 2008·Granted Oct 30, 2012·2 cites·43 claims
- 0752US2012300181A1Immersion system, exposure apparatus, exposing method, and device fabricating methodNISHII YASUFUMI·Filed 2012·Application pending·0 cites
- 0848US2007216889A1Exposure Apparatus, Exposure Method, and Method for Producing DeviceNISHII YASUFUMI·Filed 2005·Application pending·0 cites
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