Immersion system, exposure apparatus, exposing method, and device fabricating method

Abstract

An immersion system is used in liquid immersion exposure. The immersion system includes: a first member, which is disposed around the optical path of the exposure light and has a first surface that faces in a first direction; a second member that has a liquid recovery port, which is disposed on the outer side of the first surface with respect to the optical path of the exposure light; a first drive apparatus that is capable of moving the first member parallel to the first direction; and a second drive apparatus that is capable of moving the second member parallel to the first direction independently of the first member; wherein, a space between the first surface and a front surface of an object can hold the liquid; and a liquid between the liquid recovery port and the front surface of the object is recovered via the liquid recovery port.

1 . A liquid immersion exposure apparatus, comprising:
 a projection system;   a first member that has a liquid supply port, the first member having an opening disposed below a final surface of the projection system and exposure light being projected via the opening,;   a second member that has a liquid recovery port;   a first drive apparatus that moves the first member; and   a second drive apparatus that moves the second member,   wherein:   a substrate is moves below the projection system, the first member and the second member during exposure operation,   the substrate is exposed by projecting the exposure light via the opening of the first member to an upper surface of the substrate through liquid during the exposure operation,   the recovery port collects liquid on the upper surface of substrate during the exposure operation, and   a relative position of the first member and the second member is adjustable by moving the first member using the first drive apparatus, the second member using the second drive apparatus, or both of the first and second members using the first and second drive apparatus.   
     
     
         2 . The apparatus of  claim 1 , wherein:
 the first member has a first surface facing downwardly,   the second member has a second surface which faces upwardly and is disposed under the first surface of the first member, and   a gap is formed between the first surface of the first member and the second surface of the second member.