Assignee
NOVAK W THOMAS
US·7 granted patents·2 pending applications·15 citations·filing 2008–2012
Top patents by PatentIndex Score
9 records- 0188US8599488B2Optical arrangement of autofocus elements for use with immersion lithographyNOVAK W THOMAS·Filed 2011·Granted Dec 3, 2013·3 cites·25 claims
- 0282US8094379B2Optical arrangement of autofocus elements for use with immersion lithographyNOVAK W THOMAS·Filed 2009·Granted Jan 10, 2012·3 cites·44 claims
- 0382US8059258B2Liquid jet and recovery system for immersion lithographyNOVAK W THOMAS·Filed 2008·Granted Nov 15, 2011·3 cites·24 claims
- 0478US8243253B2Lyophobic run-off path to collect liquid for an immersion lithography apparatusNOVAK W THOMAS·Filed 2008·Granted Aug 14, 2012·3 cites·20 claims
- 0567US8582119B2Large scale metrology apparatus and methodNOVAK W THOMAS·Filed 2011·Granted Nov 12, 2013·3 cites·31 claims
- 0662US8830443B2Environmental system including a transport region for an immersion lithography apparatusNOVAK W THOMAS·Filed 2011·Granted Sep 9, 2014·0 cites·26 claims
- 0759US9007561B2Immersion lithography apparatus with hydrophilic region encircling hydrophobic region which encircles substrate supportNOVAK W THOMAS·Filed 2012·Granted Apr 14, 2015·0 cites·7 claims
- 0858US2012019792A1Liquid jet and recovery system for immersion lithographyNOVAK W THOMAS·Filed 2011·Application pending·0 cites
- 0947US2009047608A1Apparatus and method for transferring features to an edge of a waferNOVAK W THOMAS·Filed 2008·Application pending·0 cites
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