Assignee
OKITA SHINICHI
JP·5 granted patents·1 pending application·38 citations·filing 2005–2012
Top patents by PatentIndex Score
6 records- 0188US8566756B2Processing condition determining method and apparatus, display method and apparatus, processing apparatus, measurement apparatus and exposure apparatus, substrate processing system, and program and information recording mediumOKITA SHINICHI·Filed 2008·Granted Oct 22, 2013·14 cites·36 claims
- 0283US8982320B2Alignment information display method and its program, alignment method, exposure method, device production process, display system, display device, and program and measurement/inspection systemOKITA SHINICHI·Filed 2005·Granted Mar 17, 2015·10 cites·30 claims
- 0383US8134681B2Adjustment method, substrate processing method, substrate processing apparatus, exposure apparatus, inspection apparatus, measurement and/or inspection system, processing apparatus, computer system, program and information recording mediumOKITA SHINICHI·Filed 2007·Granted Mar 13, 2012·6 cites·37 claims
- 0481US8159650B2Device manufacturing method, device manufacturing system, and measurement/inspection apparatusOKITA SHINICHI·Filed 2008·Granted Apr 17, 2012·8 cites·24 claims
- 0551US2012133913A1Adjustment method, substrate processing method, substrate processing apparatus, exposure apparatus, inspection apparatus, measurement and/or inspection system, processing apparatus, computer system, program and information recording mediumOKITA SHINICHI·Filed 2012·Application pending·0 cites
- 0643US8090875B2Device and method for connecting device manufacturing processing apparatuses, program, device manufacturing processing system, exposure apparatus and method, and measurement and inspection apparatus and methodOKITA SHINICHI·Filed 2006·Granted Jan 3, 2012·0 cites·43 claims
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