Assignee
PAN YUNG-SHUN
1 granted patent·2 pending applications·6 citations·filing 2007–2008
Top patents by PatentIndex Score
3 records- 0164US7673637B2Photomask cleanerPAN YUNG-SHUN·Filed 2007·Granted Mar 9, 2010·6 cites·15 claims
- 0238US2009194197A1Gas filling apparatus and gas filling port thereofPAN YUNG-SHUN·Filed 2008·Application pending·0 cites
- 0333US2009194140A1Semiconductor Substrate Cleaning ApparatusPAN YUNG-SHUN·Filed 2008·Application pending·0 cites
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