Assignee
PATTERSON OLIVER D
US4 patents
Top patents by PatentIndex Score
US8750597B2Jun 10, 2014
Robust inspection alignment of semiconductor inspection tools using design information
PATTERSON OLIVER D65 citations94
US8841933B2Sep 23, 2014
Inspection tool and methodology for three dimensional voltage contrast inspection
PATTERSON OLIVER D2 citations62
US8787074B2Jul 22, 2014
Static random access memory test structure
PATTERSON OLIVER D2 citations56
US9291665B2Mar 22, 2016
Evaluating transistors with e-beam inspection
PATTERSON OLIVER D1 citations51