Assignee
PFEIFFER VACUUM
FR29 patents
Top patents by PatentIndex Score
US12066355B2Aug 20, 2024
Sniffer probe and leak detector
PFEIFFER VACUUM2 citations70
US11768134B2Sep 26, 2023
Station and method for measuring airborne molecular contamination
PFEIFFER VACUUM2 citations68
US11313752B2Apr 26, 2022
Leak detection module and method of checking the seal of an object to be tested using a tracer gas
PFEIFFER VACUUM4 citations68
US11181435B2Nov 23, 2021
Sniffer probe, leak detector and leak detection method
PFEIFFER VACUUM3 citations68
US10431484B2Oct 1, 2019
Method and station for measuring the contamination of a transport box for the atmospheric conveyance and storage of substrates
PFEIFFER VACUUM4 citations68
US11953484B2Apr 9, 2024
Method for setting an airborne molecular contamination measurement station, and measurement station
PFEIFFER VACUUM2 citations66
US10794793B2Oct 6, 2020
Device for the detection of leaks and module for the detection of leaks
PFEIFFER VACUUM2 citations66
US11519811B2Dec 6, 2022
Leak detector and leak detection method for leak-testing objects
PFEIFFER VACUUM0 citations60
US11428598B2Aug 30, 2022
Leak detector for checking sealing tightness of an object comprising a pumping device including a turbomolecular pump and first and second vacuum pumps having at least one first and second pumping stage wherein the outlet of the second vacuum pump is connected between pumping stages of the first vacuum pump
PFEIFFER VACUUM1 citations59
US12216031B2Feb 4, 2025
Station and method for measuring airborne molecular contamination
PFEIFFER VACUUM0 citations57
US12584487B2Mar 24, 2026
Turbomolecular vacuum pump and methods for manufacturing a rotor
PFEIFFER VACUUM0 citations56
US11396875B2Jul 26, 2022
Dry vacuum pump and method for controlling a synchronous motor of a vacuum pump
PFEIFFER VACUUM0 citations52
US10634577B2Apr 28, 2020
Leak detection module and method for checking the seal-tightness of an object to be tested by tracer gas
PFEIFFER VACUUM1 citations52
US11499556B2Nov 15, 2022
Dry vacuum pump with a pressure variation reducing expansion device between a pumping side volume and an oil sump
PFEIFFER VACUUM0 citations49
US11493042B2Nov 8, 2022
Pumping unit including a rough vacuum pump and a roots vacuum pump
PFEIFFER VACUUM0 citations49
US12110907B2Oct 8, 2024
Heating device and vacuum pump
PFEIFFER VACUUM0 citations48
US11815096B2Nov 14, 2023
Pump unit
PFEIFFER VACUUM0 citations47
US11430681B2Aug 30, 2022
Device and method for controlling the tightness of a transport enclosure for the conveyance and atmospheric storage of semiconductor substrates
PFEIFFER VACUUM0 citations46
US12496563B2Dec 16, 2025
Vacuum line and method for controlling a vacuum line to reduce explosion potential via injection of diluent gas to lower flammable gas concentration
PFEIFFER VACUUM0 citations44
US10478872B2Nov 19, 2019
Method and station for treatment of a transport container made of plastic material for the atmospheric storage and conveyance of substrates
PFEIFFER VACUUM0 citations43
US11078910B2Aug 3, 2021
Pumping unit and use
PFEIFFER VACUUM0 citations42
US10775259B2Sep 15, 2020
Spray device and leak detection module
PFEIFFER VACUUM0 citations41
US12410805B2Sep 9, 2025
Turbomolecular vacuum pump and associated method
PFEIFFER VACUUM0 citations40
US11493045B2Nov 8, 2022
Dry vacuum pump with at least one sealing device with a deflector
PFEIFFER VACUUM0 citations38
US11585342B2Feb 21, 2023
Primary vacuum pump of dry type and method for controlling the injection of a purge gas
PFEIFFER VACUUM0 citations36
US10578512B2Mar 3, 2020
Leak detector and method for detecting leaks
PFEIFFER VACUUM0 citations36
US11725659B2Aug 15, 2023
Dry-type primary vacuum pump and method for controlling the injection of a purging gas
PFEIFFER VACUUM0 citations35
US10578513B2Mar 3, 2020
Method for controlling the leaktightness of sealed products and installation for the detection of leaks
PFEIFFER VACUUM0 citations32
US10544809B2Jan 28, 2020
Dry roughing vacuum pump
PFEIFFER VACUUM0 citations32