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PICOSUN OY
FI48 patents
Top patents by PatentIndex Score
US9868131B2Jan 16, 2018
Atomic layer deposition with plasma source
PICOSUN OY414 citations98
US11004707B1May 11, 2021
Substrate processing apparatus and method
PICOSUN OY9 citations82
US9869020B2Jan 16, 2018
Protecting a target pump interior with an ALD coating
PICOSUN OY9 citations76
US8753716B2Jun 17, 2014
Method of depositing material using a deposition reactor
PICOSUN OY4 citations73
US11761082B2Sep 19, 2023
ALD apparatus, method and valve
PICOSUN OY3 citations71
US9745661B2Aug 29, 2017
Method and apparatus for forming a substrate web track in an atomic layer deposition reactor
PICOSUN OY4 citations71
US10982325B2Apr 20, 2021
Fluid distributing device for a thin-film deposition apparatus, related apparatus and methods
PICOSUN OY5 citations69
US9115426B2Aug 25, 2015
Coated article of martensitic steel and a method of forming a coated article of steel
PICOSUN OY4 citations68
US11447867B2Sep 20, 2022
Coating of 3-dimensional substrates
PICOSUN OY2 citations67
US10329662B2Jun 25, 2019
Protecting an interior of a hollow body with an ALD coating
PICOSUN OY2 citations65
US12351915B2Jul 8, 2025
Porous inlet
PICOSUN OY1 citations63
US12454754B2Oct 28, 2025
Atomic layer deposition reactor comprising a top-loading reaction chamber configured to carry a batch of vertically oriented substrates
PICOSUN OY0 citations62
US12383923B2Aug 12, 2025
Atomic layer deposition with plasma source
PICOSUN OY0 citations62
US11280001B2Mar 22, 2022
Substrate loading in an ALD reactor
PICOSUN OY1 citations62
US12297535B2May 13, 2025
Substrate processing methods and apparatus
PICOSUN OY0 citations61
US12146218B2Nov 19, 2024
Precursor container
PICOSUN OY0 citations61
US11970774B2Apr 30, 2024
Method of operating a deposition or cleaning apparatus
PICOSUN OY0 citations61
US11873558B2Jan 16, 2024
Precursor container
PICOSUN OY0 citations61
US11725279B2Aug 15, 2023
Deposition or cleaning apparatus with movable structure
PICOSUN OY0 citations61
US11668005B2Jun 6, 2023
Manufacturing of coated items
PICOSUN OY0 citations61
US10597778B2Mar 24, 2020
ALD method and apparatus including a photon source
PICOSUN OY1 citations61
US12460297B2Nov 4, 2025
ALD apparatus, method and valve
PICOSUN OY0 citations60
US12300523B2May 13, 2025
Substrate processing apparatus and method
PICOSUN OY1 citations60
US12110588B2Oct 8, 2024
Adjustable fluid inlet assembly for a substrate processing apparatus and method
PICOSUN OY0 citations60
US12024773B2Jul 2, 2024
Non-stick coating and its manufacturing method
PICOSUN OY0 citations60
US11976989B2May 7, 2024
Sensor and its manufacturing method
PICOSUN OY0 citations60
US11730558B2Aug 22, 2023
Color coding
PICOSUN OY0 citations60
US11668004B2Jun 6, 2023
Substrate coating
PICOSUN OY0 citations60
US11505864B2Nov 22, 2022
Adjustable fluid inlet assembly for a substrate processing apparatus and method
PICOSUN OY0 citations60
US11477894B2Oct 18, 2022
Method for formation of patterned solder mask
PICOSUN OY0 citations60
US11261526B2Mar 1, 2022
Particle coating
PICOSUN OY0 citations60
US11241316B2Feb 8, 2022
Implant coating
PICOSUN OY0 citations60
US12112927B2Oct 8, 2024
Substrate processing apparatus and method
PICOSUN OY1 citations59
US12011377B2Jun 18, 2024
Medical device with improved coating
PICOSUN OY0 citations58
US10619241B2Apr 14, 2020
ALD method and apparatus
PICOSUN OY1 citations57
US9115755B2Aug 25, 2015
Current insulated bearing components and bearings
PICOSUN OY3 citations57
US11738121B2Aug 29, 2023
Biocompatible medical device visible in x-ray and method for manufacturing thereof
PICOSUN OY0 citations55
US12325915B2Jun 10, 2025
Substrate processing apparatus and method
PICOSUN OY0 citations53
US10161038B2Dec 25, 2018
Substrate loading in an ALD reactor
PICOSUN OY1 citations52
US9840775B2Dec 12, 2017
Method and apparatus for processing particulate material
PICOSUN OY1 citations52
US12065730B2Aug 20, 2024
Coating of fluid-permeable materials
PICOSUN OY0 citations50
US11759100B2Sep 19, 2023
Method and apparatus for cleaning medical instruments and for detecting residue thereon
PICOSUN OY0 citations50
US10600058B2Mar 24, 2020
Anti-counterfeit signature
PICOSUN OY0 citations50
US12247288B2Mar 11, 2025
Substrate processing apparatus and method
PICOSUN OY0 citations49
US11992425B2May 28, 2024
Spring loaded medical device
PICOSUN OY0 citations49
US11414758B2Aug 16, 2022
Sample protection
PICOSUN OY0 citations47
US10011904B2Jul 3, 2018
Atomic layer deposition apparatus and loading methods
PICOSUN OY0 citations44
US11326254B2May 10, 2022
Protecting an interior of a gas container with an ALD coating
PICOSUN OY0 citations42