Assignee
PRI AUTOMATION INC
US30 patents
Top patents by PatentIndex Score
US6711731B2Mar 23, 2004
Web based tool control in a semiconductor fabrication facility
PRI AUTOMATION INC80 citations98
US6562094B2May 13, 2003
Reticle storage and retrieval system
PRI AUTOMATION INC374 citations96
US6397990B1Jun 4, 2002
Materials transport system having inductive power transfer
PRI AUTOMATION INC109 citations95
US6265851B1Jul 24, 2001
Ultracapacitor power supply for an electric vehicle
PRI AUTOMATION INC135 citations95
US5615988AApr 1, 1997
Wafer transfer system having rotational capability
PRI AUTOMATION INC76 citations95
US6285951B1Sep 4, 2001
Dynamic traffic based routing algorithm
PRI AUTOMATION INC123 citations94
US5970621AOct 26, 1999
Semiconductor wafer cassette positioning and detection mechanism
PRI AUTOMATION INC498 citations94
US6454512B1Sep 24, 2002
Person-guided vehicle
PRI AUTOMATION INC52 citations93
US6452503B1Sep 17, 2002
Semiconductor wafer imaging system
PRI AUTOMATION INC24 citations93
US6443686B1Sep 3, 2002
Material handling and transport system and process
PRI AUTOMATION INC50 citations93
US6106213AAug 22, 2000
Automated door assembly for use in semiconductor wafer manufacturing
PRI AUTOMATION INC38 citations92
US5673804AOct 7, 1997
Hoist system having triangular tension members
PRI AUTOMATION INC27 citations92
US5741109AApr 21, 1998
Wafer transfer system having vertical lifting capability
PRI AUTOMATION INC37 citations91
US5647718AJul 15, 1997
Straight line wafer transfer system
PRI AUTOMATION INC29 citations91
US6686823B2Feb 3, 2004
Inductive power transmission and distribution apparatus using a coaxial transformer
PRI AUTOMATION INC55 citations89
US6647316B2Nov 11, 2003
Traffic management system and method for materials handling using traffic balancing and traffic density
PRI AUTOMATION INC64 citations88
US6623235B2Sep 23, 2003
Robot arm edge gripping device for handling substrates using two four-bar linkages
PRI AUTOMATION INC42 citations87
US6520726B1Feb 18, 2003
Apparatus and method for using a robot to remove a substrate carrier door
PRI AUTOMATION INC33 citations84
US6273237B1Aug 14, 2001
Rotating shuttle payload platform
PRI AUTOMATION INC22 citations83
US6290188B1Sep 18, 2001
Collision avoidance system for track-guided vehicles
PRI AUTOMATION INC33 citations80
US6165268ADec 26, 2000
Wafer carrier adapter and method for use thereof
PRI AUTOMATION INC19 citations80
US6913302B2Jul 5, 2005
Robot arm edge gripping device for handling substrates
PRI AUTOMATION INC17 citations78
US6447233B1Sep 10, 2002
Automated door assembly for use in semiconductor wafer manufacturing
PRI AUTOMATION INC7 citations73
US6405843B1Jun 18, 2002
Self supporting cable for use with linear motion devices
PRI AUTOMATION INC13 citations73
US6053478AApr 25, 2000
Wafer hoist with self-aligning bands
PRI AUTOMATION INC10 citations73
US6278201B1Aug 21, 2001
Power sharing among multiple power supplies in a material handling system
PRI AUTOMATION INC13 citations71
US6609874B2Aug 26, 2003
Handler for the transporting of flat substrates for application in the semi-conductor industry
PRI AUTOMATION INC9 citations66
US6345851B1Feb 12, 2002
Robotic gripping device for gripping an object having a handle on an upper surface
PRI AUTOMATION INC3 citations62
US6732207B2May 4, 2004
Fast serial interface used for controller to robot communications
PRI AUTOMATION INC2 citations53
US6719100B2Apr 13, 2004
Interfloor vertical transport and horizontal closure system
PRI AUTOMATION INC1 citations33