Assignee

RAO XUESONG

SG2 patents

Top patents by PatentIndex Score

US8492236B1Jul 23, 2013

Step-like spacer profile

RAO XUESONG0 citations46

US8828858B2Sep 9, 2014

Spacer profile engineering using films with continuously increased etch rate from inner to outer surface

RAO XUESONG0 citations45