Assignee
SAKAI MASANORI
JP8 patents
Top patents by PatentIndex Score
US8828141B2Sep 9, 2014
Substrate processing apparatus and method for manufacturing semiconductor device
SAKAI MASANORI11 citations83
US8461062B2Jun 11, 2013
Substrate processing apparatus and method for manufacturing semiconductor device
SAKAI MASANORI10 citations83
US9238257B2Jan 19, 2016
Method of manufacturing semiconductor device, cleaning method, and substrate processing apparatus
SAKAI MASANORI4 citations72
US9169553B2Oct 27, 2015
Semiconductor device producing method
SAKAI MASANORI2 citations61
US8614147B2Dec 24, 2013
Method of manufacturing a semiconductor device
SAKAI MASANORI0 citations52
US8901011B2Dec 2, 2014
Substrate processing apparatus and semiconductor device producing method
SAKAI MASANORI0 citations51
US8257093B2Sep 4, 2012
Electronic apparatus
SAKAI MASANORI0 citations48
US8598047B2Dec 3, 2013
Substrate processing apparatus and producing method of semiconductor device
SAKAI MASANORI0 citations41