Assignee
SASAKI YASUHARU
JP·7 granted patents·1 pending application·46 citations·filing 2000–2011
Top patents by PatentIndex Score
8 records- 0191US8981263B2Electrostatic chuck apparatusSASAKI YASUHARU·Filed 2010·Granted Mar 17, 2015·15 cites·11 claims
- 0286US8696862B2Substrate mounting table, substrate processing apparatus and substrate temperature control methodSASAKI YASUHARU·Filed 2009·Granted Apr 15, 2014·11 cites·14 claims
- 0379US8823404B2Evaluation device and evaluation method for substrate mounting apparatus and evaluation substrate used for the sameSASAKI YASUHARU·Filed 2011·Granted Sep 2, 2014·4 cites·16 claims
- 0478US6753295B1Plant activator, process for producing the same, activation method, activity promoter and method for applying the promoterSASAKI YASUHARU·Filed 2000·Granted Jun 22, 2004·6 cites·2 claims
- 0577US8950469B2Temperature control system and temperature control method for substrate mounting tableSASAKI YASUHARU·Filed 2010·Granted Feb 10, 2015·4 cites·6 claims
- 0677US8573836B2Apparatus and method for evaluating a substrate mounting deviceSASAKI YASUHARU·Filed 2007·Granted Nov 5, 2013·6 cites·8 claims
- 0744US2012043024A1Substrate processing apparatus and temperature adjustment methodSASAKI YASUHARU·Filed 2011·Application pending·0 cites
- 0839US9484232B2Zone temperature control structureSASAKI YASUHARU·Filed 2011·Granted Nov 1, 2016·0 cites·12 claims
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