Assignee
SHEN MEIHUA
US·1 granted patent·2 pending applications·4 citations·filing 2007–2009
Top patents by PatentIndex Score
3 records- 0166US8101525B2Method for fabricating a semiconductor device having a lanthanum-family-based oxide layerSHEN MEIHUA·Filed 2009·Granted Jan 24, 2012·4 cites·21 claims
- 0244US2008057729A1Etch methods to form anisotropic features for high aspect ratio applicationsSHEN MEIHUA·Filed 2007·Application pending·0 cites
- 0342US2009004875A1Methods of trimming amorphous carbon film for forming ultra thin structures on a substrateSHEN MEIHUA·Filed 2008·Application pending·0 cites
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