Etch methods to form anisotropic features for high aspect ratio applications

Abstract

Methods for forming anisotropic features for high aspect ratio application in etch process are provided in the present invention. The methods described herein advantageously facilitates profile and dimension control of features with high aspect ratios through a sidewall passivation management scheme. In one embodiment, sidewall passivations are managed by selectively forming an oxidation passivation layer on the sidewall and/or bottom of etched layers. In another embodiment, sidewall passivation is managed by periodically clearing the overburden redeposition layer to preserve an even and uniform passivation layer thereon. The even and uniform passivation allows the features with high aspect ratios to be incrementally etched in a manner that pertains a desired depth and vertical profile of critical dimension in both high and low feature density regions on the substrate without generating defects and/or overetching the underneath layers.

1 . A method for anisotropic etching a layer on a substrate, comprising: 
 (a) placing a substrate having a layer disposed thereon in an etch chamber;    (b) etching at least a portion of the layer on the substrate in the etch chamber;    (c) oxidizing the etched layer to form an oxidation layer on the etched layer; and    (d) etching the exposed portion of the etched layer unprotected by the oxidation layer in the etch chamber.    
   
   
       2 . The method of  claim 1  further comprising: 
 etching a redeposition layer from etching byproducts formed during (b) using a fluorine-containing gas.    
   
   
       3 . The method of  claim 1 , wherein etching at least a portion of the layer further comprising: 
 repeating (c)-(d) to incrementally etch the layer.    
   
   
       4 . The method of  claim 1  further comprising; 
 cyclically etching byproducts disposed on a patterned mask layer disposed on the layer to reopen openings defined by the patterned mask layer.    
   
   
       5 . The method of  claim 2 , wherein the fluorine-containing gas includes at least one of nitrogen trifluoride gas (NF 3 ), sulfur hexafluoride gas (SF 6 ), or tetrafluoromethane gas (CF 4 ), CHF 3 , and C 4 F 8 .  
   
   
       6 . The method of  claim 1 , wherein oxidizing the etched layer further comprises: 
 forming the oxidation layer on a sidewall formed in the etched layer.    
   
   
       7 . The method of  claim 1  wherein oxidizing the etched layer further comprises: 
 forming the oxidation layer preferentially in a first group of features having a low pattern density over a second group of features having a high pattern density.    
   
   
       8 . The method of  claim 1 , wherein oxidizing the etched layer further comprises: 
 supplying an oxygen-containing gas into the etch chamber.    
   
   
       9 . The method of  claim 1 , wherein oxidizing the etched layer further comprises: 
 exposing the substrate to an oxygen-containing environment.    
   
   
       10 . A method for anisotropic etching a layer on a substrate, comprising: 
 (a) placing a substrate having a film stack comprising a first layer and a second layer in an etch chamber;    (b) etching the film stack to expose the first and the second layer in the etch chamber;    (c) oxidizing the first layer to form an oxidation layer on the etched first layer; and    (d) etching the second layer in the etch chamber.    
   
   
       11 . The method of  claim 10 , wherein etching the film stack to expose the first and second layer further comprising: 
 etching the first layer;    forming an oxidation layer on the first layer; and    etching the first layer to expose the second layer.    
   
   
       12 . The method of  claim 10 , wherein etching the film stack to expose the first and second layer further comprising: 
 flowing a fluorine-containing gas into the chamber; and    etching a redeposition layer from etching byproducts formed during etching the first layer.    
   
   
       13 . The method of  claim 10  further comprising: 
 repeating (c)-(d) to incrementally etch the second layer.    
   
   
       14 . The method of  claim 12  further comprising: 
 cyclically removing the redeposition layer to maintain an opening defined in a patterned mask layer.    
   
   
       15 . The method of  claim 12 , wherein etching a redeposition layer further comprises: 
 etching the redeposition layer with a fluorine-containing gas.    
   
   
       16 . The method of  claim 10  wherein the second layer is a high-k material.  
   
   
       17 . The method of  claim 16 , wherein the high-k material is a material selected from the group consisting of hafnium dioxide, zirconium dioxide, hafnium silicon oxide, zirconium silicon oxide, tantalum dioxide, aluminum oxide, aluminum doped hafnium dioxide, and combinations thereof.  
   
   
       18 . The method of  claim 10 , wherein the first layer is a polysilicon layer.  
   
   
       19 . The method of  claim 10 , wherein oxidizing the first layer further comprises: 
 preferentially forming the oxidation layer in regions of low patterned density over regions of high pattern density.    
   
   
       20 . The method of  claim 10 , wherein the oxidation layer is formed on a sidewall of the first layer.  
   
   
       21 . The method of  claim 10 , further comprising: 
 oxidizing a portion of the etched of the second layer to form an oxidation layer thereon prior to completing etching of the first layer.    
   
   
       22 . The method of  claim 14  wherein the second layer is a dielectric layer including an oxide layer, a nitrogen layer, a composite of oxide and nitrogen layer, and at least one or more oxide layers sandwiching a nitrogen layer.