Assignee
SHINRIKI HIROSHI
JP·2 granted patents·1 pending application·467 citations·filing 2005–2008
Top patents by PatentIndex Score
3 records- 0197US8084104B2Atomic composition controlled ruthenium alloy film formed by plasma-enhanced atomic layer depositionSHINRIKI HIROSHI·Filed 2008·Granted Dec 27, 2011·464 cites·15 claims
- 0277US8133555B2Method for forming metal film by ALD using beta-diketone metal complexSHINRIKI HIROSHI·Filed 2008·Granted Mar 13, 2012·3 cites·16 claims
- 0350US2006081186A1Single-substrate-heat-processing apparatus for performing reformation and crystallizationSHINRIKI HIROSHI·Filed 2005·Application pending·0 cites
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