Assignee
SVAGOS TECHNIK INC
US·5 granted patents·1 pending application·14 citations·filing 2016–2021
Top patents by PatentIndex Score
6 records- 0195US11111600B1Process chamber with resistive heatingSVAGOS TECHNIK INC·Filed 2017·Granted Sep 7, 2021·6 cites·20 claims
- 0295US10947640B1CVD reactor chamber with resistive heating for silicon carbide depositionSVAGOS TECHNIK INC·Filed 2017·Granted Mar 16, 2021·6 cites·23 claims
- 0371US10961621B2CVD reactor chamber with resistive heating and substrate holderSVAGOS TECHNIK INC·Filed 2016·Granted Mar 30, 2021·2 cites·17 claims
- 0470US2022064819A1Cvd reactor chamber with resistive heating for silicon carbide depositionSVAGOS TECHNIK INC·Filed 2021·Application pending·0 cites
- 0559US11041253B2Silicon wafers by epitaxial depositionSVAGOS TECHNIK INC·Filed 2018·Granted Jun 22, 2021·0 cites·17 claims
- 0637US10847421B2Semiconductor layer separation from single crystal silicon substrate by infrared irradiation of porous silicon separation layerSVAGOS TECHNIK INC·Filed 2017·Granted Nov 24, 2020·0 cites·34 claims
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