Assignee
TADA KUNIHIRO
JP·1 granted patent·4 pending applications·2 citations·filing 2003–2010
Top patents by PatentIndex Score
5 records- 0158US8124168B2Substrate processing method and substrate processing apparatusTADA KUNIHIRO·Filed 2006·Granted Feb 28, 2012·2 cites·7 claims
- 0245US2009071404A1Method of forming titanium film by CVDTADA KUNIHIRO·Filed 2008·Application pending·0 cites
- 0339US2005233093A1Film formation method and apparatus utilizing plasma CVDTADA KUNIHIRO·Filed 2005·Application pending·0 cites
- 0438US2010240216A1Film formation method and apparatus utilizing plasma cvdTADA KUNIHIRO·Filed 2010·Application pending·0 cites
- 0536US2006105104A1Method for introducing gas to treating apparatus having shower head portionTADA KUNIHIRO·Filed 2003·Application pending·0 cites
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