Assignee
THALLNER ERICH
34 patents
Top patents by PatentIndex Score
US7909374B2Mar 22, 2011
Handling device and handling method for wafers
THALLNER ERICH24 citations92
US7910454B2Mar 22, 2011
Combination of a substrate and a wafer
THALLNER ERICH14 citations92
US8536020B2Sep 17, 2013
Combination of a substrate and a wafer
THALLNER ERICH5 citations84
US8443864B2May 21, 2013
Device for stripping a wafer from a carrier
THALLNER ERICH10 citations84
US8157615B2Apr 17, 2012
Device and process for applying and/or detaching a wafer to/from a carrier
THALLNER ERICH10 citations84
US9682539B2Jun 20, 2017
Substrate composite, method and device for bonding of substrates
THALLNER ERICH2 citations73
US9478501B2Oct 25, 2016
Substrate processing and alignment
THALLNER ERICH2 citations63
US8926775B2Jan 6, 2015
Method and device for bonding two wafers
THALLNER ERICH2 citations63
US8293063B2Oct 23, 2012
Combination of a substrate and a wafer
THALLNER ERICH2 citations63
US8156981B2Apr 17, 2012
Combination of a substrate and a wafer
THALLNER ERICH2 citations63
US8157307B2Apr 17, 2012
Handling device and handling method for wafers
THALLNER ERICH3 citations63
US8118290B2Feb 21, 2012
Method for holding wafers and device for fixing two parallel arranged wafers relative to one another
THALLNER ERICH2 citations63
US8087708B2Jan 3, 2012
Handling device and handling method for wafers
THALLNER ERICH4 citations63
US7998833B2Aug 16, 2011
Method for bonding wafers
THALLNER ERICH2 citations63
US7811898B2Oct 12, 2010
Method and device for bonding wafers
THALLNER ERICH3 citations63
US7246445B2Jul 24, 2007
Alignment device
THALLNER ERICH4 citations63
US12581906B2Mar 17, 2026
Method for bonding and debonding substrates
THALLNER ERICH0 citations62
US8586132B2Nov 19, 2013
Device and method for coating a micro- and/or nano-structured structural substrate and coated structural substrate
THALLNER ERICH4 citations59
US10014202B2Jul 3, 2018
Device and method for aligning substrates
THALLNER ERICH1 citations52
US9343348B2May 17, 2016
Substrate-product substrate combination and device and method for producing a substrate-product substrate combination
THALLNER ERICH1 citations52
US9052422B2Jun 9, 2015
Method and device for producing a microlens
THALLNER ERICH1 citations52
US8875766B2Nov 4, 2014
Device and method for the application of a sheet-like jointing means onto a contact area of a wafer
THALLNER ERICH0 citations52
US8802542B2Aug 12, 2014
Combination of a substrate and a wafer
THALLNER ERICH0 citations52
US8664082B2Mar 4, 2014
Combination of a substrate and a wafer
THALLNER ERICH0 citations52
US8591794B2Nov 26, 2013
Method and device for producing a nanopatterned disc
THALLNER ERICH0 citations52
US8500930B2Aug 6, 2013
Device and method for the application of a sheet-like jointing means onto a contact area of a wafer
THALLNER ERICH0 citations52
US8349701B2Jan 8, 2013
Combination of a substrate and a wafer
THALLNER ERICH0 citations52
US8142701B2Mar 27, 2012
Method and device for producing a nanopatterned disc
THALLNER ERICH1 citations52
US7722350B2May 25, 2010
Apparatus for imprinting and/or embossing substrates
THALLNER ERICH0 citations52
US7598152B2Oct 6, 2009
Device and method for bonding wafers
THALLNER ERICH0 citations52
US7547611B2Jun 16, 2009
Process and device for bonding wafers
THALLNER ERICH1 citations52
US7432701B2Oct 7, 2008
Adjusting device and arrangement for adjusting a wafer
THALLNER ERICH0 citations52
US10276409B2Apr 30, 2019
Sample holder, device and method for detaching of a first substrate
THALLNER ERICH0 citations42
US8212989B2Jul 3, 2012
Device for transferring structures which are provided in a mask onto a substrate
THALLNER ERICH0 citations42