Device for transferring structures which are provided in a mask onto a substrate

Abstract

The invention concerns a device for transferring structures which are provided in a mask onto a substrate, with at least one illumination device, for homogeneous illumination of a section of the mask, and with a mask holding device, for holding a mask in a mask plane which is defined by an X axis and a Y axis which is perpendicular to it, and with at least one lens device, which is arranged on the side of the mask plane facing away from the illumination device, for mapping the structures onto the substrate, and with a substrate holding device, for holding the substrate in a substrate plane which is parallel to the mask plane and at a distance from the lens device, and with means for synchronous movement of the illumination device and lens device in parallel, relative to the mask plane and substrate plane, along the X axis and/or along the Y axis.

1. Device for transferring the shape of structures which are provided in a mask onto a substrate, the device comprising:
 at least one illumination device for homogeneous illumination of a section of the mask, 
 a mask holding device for holding the mask in a mask plane which is defined by an X axis and a Y axis which is perpendicular to the X axis, 
 at least one lens device which is arranged on the side of the mask plane facing away from the at least one illumination device, the at least one lens device for mapping the shape of structures in the mask onto the substrate, 
 a substrate holding device for holding the substrate in a substrate plane which is parallel to the mask plane and at a distance from the at least one lens device, and 
 synchronous movement means for synchronous movement of the at least one illumination device and the at least one lens device in a direction parallel to the mask plane and the substrate plane, the synchronous movement means moving the at least one illumination device and the at least one lens device in a direction parallel to the X axis and/or the Y axis of the mask plane. 
 
     
     
       2. Device according to  claim 1 , wherein
 the at least one illumination device is designed to generate a homogeneous (in energy terms) illumination strip in the mask plane. 
 
     
     
       3. Device according to  claim 1 , wherein
 the at least one illumination device includes multiple LED's. 
 
     
     
       4. Device according to  claim 3 , wherein
 the LED's are arranged next to each other along the X axis and/or along the Y axis. 
 
     
     
       5. Device according to  claim 3 , wherein
 a lens unit is associated with each LED or group of LED's. 
 
     
     
       6. Device according to  claim 3 , wherein
 the LED's can be put into an (in particular high-frequency) oscillation, preferably along the X axis or Y axis. 
 
     
     
       7. Device according to  claim 1 , wherein
 the mask holding device has adjustment means, in particular piezo positioning elements, to adjust the mask, in particular for positioning it, preferably by sections, along a Z axis, which runs perpendicularly to the X axis and Y axis. 
 
     
     
       8. Device according to  claim 1 , wherein
 the at least one lens device is designed to generate a mapping strip in the substrate plane. 
 
     
     
       9. Device according to  claim 1 , wherein
 the at least one lens device can be adjusted depending on a temperature, in particular the mask temperature and/or the mask environment temperature and/or the substrate temperature and/or the substrate environment temperature, and/or depending on the change of length and/or thickness of the mask and/or the substrate. 
 
     
     
       10. Device according to  claim 1 , wherein
 the at least one lens device includes at least two, in particular long stretched, lenses, which can be positioned relative to each other, preferably along the Z axis. 
 
     
     
       11. Device according to  claim 10 , wherein
 the lenses can be positioned relative to each other, in particular along the Z axis, depending on a temperature, in particular the mask temperature and/or the mask environment temperature and/or the substrate temperature and/or the substrate environment temperature. 
 
     
     
       12. Device according to  claim 1 , wherein
 the at least one lens device includes spherical cylindrical lenses and/or cartesian oval lenses. 
 
     
     
       13. Device according to  claim 1 , wherein
 the extent of the at least one illumination device and the at least one lens device along the X axis or along the Y axis corresponds at least approximately to the extent of the substrate along the corresponding axis. 
 
     
     
       14. Device according to  claim 1 , wherein
 a control unit, which is designed to set the exposure intensity of the substrate by adapting the motion speed of the at least one illumination device and the at least one lens device, is provided. 
 
     
     
       15. A device for transferring the shape of structures in a mask to a substrate, said device comprising:
 a mask holding device for holding the mask in a mask plane, said mask holding device having a first side and a second side, said first side being opposite said second side; 
 at least one illuminating device for homogeneous illumination of a section of said mask, said at least one illumination device disposed adjacent to said first side of said mask holding device; 
 at least one lens device associated with said at least one illumination device, said at least one lens device having a first side and a second side, said first side of said at least one lens device disposed adjacent to said second side of mask holding device; and 
 a substrate holding device for holding the substrate in a substrate plane that is parallel to said mask plane, said substrate holding device disposed adjacent to said second side of said lens device, 
 wherein said at least one illumination device moves in a synchronous manner with said at least one lens device in a plane parallel to said mask plane and said substrate plane. 
 
     
     
       16. A device for transferring the shape of structures in a mask to a substrate, said device comprising:
 a mask holding device for holding said mask in a mask plane, said mask holding device having a first side and a second side, said first side being opposite said second side; 
 at least one illumination device for homogeneous illumination of a section of said mask, said at least one illumination device disposed adjacent to said first side of said mask holding device, said at least one illumination device including multiple LEDs wherein an illumination intensity of each individual LED or group of LEDs is variable; 
 at least one lens device associated with said at least one illumination device, said at least one lens device having a first side and a second side, said first side of said at least one lens device disposed adjacent to said second side of mask holding device; and 
 a substrate holding device for holding said substrate in a substrate plane that is parallel to said mask plane, said substrate holding device disposed adjacent to said second side of said lens device, 
 wherein said at least one illumination device moves in a synchronous manner with said at least one lens device in a plane parallel to said mask plane and said substrate plane. 
 
     
     
       17. Device for transferring the shape of structures which are provided in a mask onto a substrate, the device comprising:
 at least one illumination device for homogeneous illumination of a section of the mask, 
 a mask holding device for holding the mask in a mask plane which is defined by an X axis and a Y axis which is perpendicular to the X axis, 
 at least one lens device which is arranged on the side of the mask plane facing away from the at least one illumination device, the at least one lens device for mapping the shape of structures in the mask onto the substrate, 
 a substrate holding device for holding the substrate in a substrate plane which is parallel to the mask plane and at a distance from the at least one lens device, and 
 synchronous movement means for synchronous movement of the at least one illumination device and the at least one lens device in a direction parallel to the mask plane and the substrate plane, the synchronous movement means moving the at least one illumination device and the at least one lens device in a direction parallel to the X axis and/or the Y axis of the mask plane, 
 wherein the at least one lens device generates a mapping strip in the substrate plane. 
 
     
     
       18. Device according to  claim 17 , further comprising:
 a control unit that monitors the temperature of the mask and/or the substrate and adjusts the position of the mask and/or the substrate based on the temperature of the mask and/or the substrate.