Inventor
THALLNER ERICH
AT47 patents
⚠️ This page may combine multiple inventors who share the name “THALLNER ERICH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
THALLNER ERICH
34 patentsUS7910454B2Mar 22, 2011
Combination of a substrate and a wafer
THALLNER ERICH14 citations92
US7909374B2Mar 22, 2011
Handling device and handling method for wafers
THALLNER ERICH24 citations92
US8536020B2Sep 17, 2013
Combination of a substrate and a wafer
THALLNER ERICH5 citations84
US8443864B2May 21, 2013
Device for stripping a wafer from a carrier
THALLNER ERICH10 citations84
US8157615B2Apr 17, 2012
Device and process for applying and/or detaching a wafer to/from a carrier
THALLNER ERICH10 citations84
US9682539B2Jun 20, 2017
Substrate composite, method and device for bonding of substrates
THALLNER ERICH2 citations73
US9478501B2Oct 25, 2016
Substrate processing and alignment
THALLNER ERICH2 citations63
US8926775B2Jan 6, 2015
Method and device for bonding two wafers
THALLNER ERICH2 citations63
US8293063B2Oct 23, 2012
Combination of a substrate and a wafer
THALLNER ERICH2 citations63
US8156981B2Apr 17, 2012
Combination of a substrate and a wafer
THALLNER ERICH2 citations63
US8157307B2Apr 17, 2012
Handling device and handling method for wafers
THALLNER ERICH3 citations63
US8118290B2Feb 21, 2012
Method for holding wafers and device for fixing two parallel arranged wafers relative to one another
THALLNER ERICH2 citations63
US8087708B2Jan 3, 2012
Handling device and handling method for wafers
THALLNER ERICH4 citations63
US7998833B2Aug 16, 2011
Method for bonding wafers
THALLNER ERICH2 citations63
US7811898B2Oct 12, 2010
Method and device for bonding wafers
THALLNER ERICH3 citations63
US7246445B2Jul 24, 2007
Alignment device
THALLNER ERICH4 citations63
US12581906B2Mar 17, 2026
Method for bonding and debonding substrates
THALLNER ERICH0 citations62
US8586132B2Nov 19, 2013
Device and method for coating a micro- and/or nano-structured structural substrate and coated structural substrate
THALLNER ERICH4 citations59
US10014202B2Jul 3, 2018
Device and method for aligning substrates
THALLNER ERICH1 citations52
US9343348B2May 17, 2016
Substrate-product substrate combination and device and method for producing a substrate-product substrate combination
THALLNER ERICH1 citations52
US9052422B2Jun 9, 2015
Method and device for producing a microlens
THALLNER ERICH1 citations52
US8875766B2Nov 4, 2014
Device and method for the application of a sheet-like jointing means onto a contact area of a wafer
THALLNER ERICH0 citations52
US8802542B2Aug 12, 2014
Combination of a substrate and a wafer
THALLNER ERICH0 citations52
US8664082B2Mar 4, 2014
Combination of a substrate and a wafer
THALLNER ERICH0 citations52
US8591794B2Nov 26, 2013
Method and device for producing a nanopatterned disc
THALLNER ERICH0 citations52
US8500930B2Aug 6, 2013
Device and method for the application of a sheet-like jointing means onto a contact area of a wafer
THALLNER ERICH0 citations52
US8349701B2Jan 8, 2013
Combination of a substrate and a wafer
THALLNER ERICH0 citations52
US8142701B2Mar 27, 2012
Method and device for producing a nanopatterned disc
THALLNER ERICH1 citations52
US7722350B2May 25, 2010
Apparatus for imprinting and/or embossing substrates
THALLNER ERICH0 citations52
US7598152B2Oct 6, 2009
Device and method for bonding wafers
THALLNER ERICH0 citations52
US7547611B2Jun 16, 2009
Process and device for bonding wafers
THALLNER ERICH1 citations52
US7432701B2Oct 7, 2008
Adjusting device and arrangement for adjusting a wafer
THALLNER ERICH0 citations52
US10276409B2Apr 30, 2019
Sample holder, device and method for detaching of a first substrate
THALLNER ERICH0 citations42
US8212989B2Jul 3, 2012
Device for transferring structures which are provided in a mask onto a substrate
THALLNER ERICH0 citations42
(unassigned)
5 patentsUS6214692B1Apr 10, 2001
Method and apparatus for the aligned joining of disk-shaped semiconductor substrates
93 citations98
US6792991B2Sep 21, 2004
Device for detaching a carrier from a semi-conductor disk
53 citations92
US6416579B1Jul 9, 2002
Apparatus for treating silicon wafers
21 citations92
US6485568B1Nov 26, 2002
Apparatus for coating substrates with materials, particularly for lacquering si-wafers
11 citations74
US6727983B2Apr 27, 2004
Adjustment table
0 citations42
EV GROUP E THALLNER GMBH
4 patentsUS9666470B2May 30, 2017
Receptacle device, device and method for handling substrate stacks
EV GROUP E THALLNER GMBH5 citations84
US9418882B2Aug 16, 2016
Device and method for aligning substrates
EV GROUP E THALLNER GMBH9 citations84
US9941149B2Apr 10, 2018
Receptacle device, device and method for handling substrate stacks
EV GROUP E THALLNER GMBH1 citations63
US10347523B2Jul 9, 2019
Receptacle device, device and method for handling substrate stacks
EV GROUP E THALLNER GMBH0 citations52
EV GROUP GMBH
3 patentsUS8905111B2Dec 9, 2014
Device for releasing an interconnect layer that provides connection between a carrier and a wafer
EV GROUP GMBH0 citations52
US8603294B2Dec 10, 2013
Method for stripping a wafer from a carrier
EV GROUP GMBH0 citations52
US10279551B2May 7, 2019
Method for producing a microlens
EV GROUP GMBH0 citations51