Individual holder
WIRTH PAUL Z
0 granted patents·3 pending applications·0 citations·filing 2005–2007
Individually held — no corporate assignee on record.
Top patents by PatentIndex Score
3 records- 0153US2007057352A1Method and apparatus for thermally processing microelectronic workpiecesWIRTH PAUL Z·Filed 2006·Application pending·0 cites
- 0245US2008203083A1Single wafer anneal processorWIRTH PAUL Z·Filed 2007·Application pending·0 cites
- 0341US2006009047A1Modular tool unit for processing microelectronic workpiecesWIRTH PAUL Z·Filed 2005·Application pending·0 cites
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