Assignee
YABU TAKAYUKI
JP·5 granted patents·5 pending applications·43 citations·filing 2009–2012
Top patents by PatentIndex Score
10 records- 0194US8497489B2Chamber apparatus and method of maintaining target supply unitYABU TAKAYUKI·Filed 2011·Granted Jul 30, 2013·16 cites·4 claims
- 0289US8610095B2Extreme ultraviolet light source deviceYABU TAKAYUKI·Filed 2010·Granted Dec 17, 2013·12 cites·13 claims
- 0380US8698112B2Extreme ultraviolet light generation apparatusYABU TAKAYUKI·Filed 2012·Granted Apr 15, 2014·5 cites·12 claims
- 0475US8604451B2Target supply apparatusYABU TAKAYUKI·Filed 2009·Granted Dec 10, 2013·10 cites·26 claims
- 0547US2012311969A1Target supply unit of extreme ultraviolet light source apparatus and method of manufacturing the sameYABU TAKAYUKI·Filed 2012·Application pending·0 cites
- 0643US8809819B2Target supply unit and extreme ultraviolet light generation apparatusYABU TAKAYUKI·Filed 2012·Granted Aug 19, 2014·0 cites·16 claims
- 0739US2013134326A1Extreme ultraviolet light generation apparatus, target collection device, and target collection methodYABU TAKAYUKI·Filed 2012·Application pending·0 cites
- 0838US2012205559A1Target supply device and extreme ultraviolet light generation apparatusYABU TAKAYUKI·Filed 2012·Application pending·0 cites
- 0938US2013075625A1Target supply unit and extreme ultraviolet light generation apparatusYABU TAKAYUKI·Filed 2012·Application pending·0 cites
- 1037US2012085922A1Chamber apparatus and method of controlling movement of droplet in the chamber apparatusYABU TAKAYUKI·Filed 2011·Application pending·0 cites
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