Target supply unit of extreme ultraviolet light source apparatus and method of manufacturing the same

Abstract

In a target supply unit of an extreme ultraviolet light source apparatus for generating extreme ultraviolet light by applying a laser beam to a target material to turn the target material into plasma, clogging of a target nozzle for supplying the target material to a laser beam application point is suppressed. The target supply unit includes: a target container for accommodating the target material; a target nozzle for injecting the target material supplied from the target container; and a reducing gas supply unit for supplying a reducing gas into the target container. Instead of using the reducing gas, a carbon-based material having a reduction action may be provided within the target container for causing reduction reaction.

1 - 12 . (canceled) 
     
     
         13 . A method of manufacturing a target supply unit to be used in an extreme ultraviolet light source apparatus for generating extreme ultraviolet light by applying a laser beam to a target material to turn the target material into plasma, said method comprising the steps of:
 (a) accommodating the target material within a target container connected to a target nozzle;   (b) reducing an oxide contained in the target material accommodated within said target container; and   (c) sealing said target container.   
     
     
         14 . The method according to  claim 13 , wherein step (a) includes accommodating the target material within a target container including a carbon-based material having a reduction action. 
     
     
         15 . The method according to  claim 13 , wherein step (b) includes introducing a reducing gas within said target container. 
     
     
         16 . The method according to  claim 13 , wherein step (b) includes exhausting a gas within said target container. 
     
     
         17 . The method according to  claim 15 , wherein said reducing gas contains at least one of hydrogen gas, hydrogen radical, and carbon monoxide gas.