Inventor · disambiguated record
Takanobu Ishihara
Also filed as: ISHIHARA TAKANOBU
28 granted patents·7 pending applications·214 citations·filing 1994–2024
96Inventor score
Top patents by PatentIndex Score
35 records- 0194US7999241B2Extreme ultraviolet light source apparatusGIGAPHOTON INC·Filed 2009·Granted Aug 16, 2011·40 cites·12 claims
- 0290US8003963B2Extreme ultraviolet light source apparatusGIGAPHOTON INC·Filed 2009·Granted Aug 23, 2011·21 cites·23 claims
- 0389US7782922B2Excimer laser device operable at high repetition rate and having high band-narrowing efficiencyKOMATSU MFG CO LTD·Filed 2008·Granted Aug 24, 2010·12 cites·8 claims
- 0488US8530869B2Extreme ultraviolet light source apparatusNAGAI SHINJI·Filed 2011·Granted Sep 10, 2013·7 cites·22 claims
- 0585US9192038B2Target supply apparatus, control system, control apparatus and control circuit thereofGIGAPHOTON INC·Filed 2013·Granted Nov 17, 2015·5 cites·9 claims
- 0685US8242474B2Extreme ultraviolet light generation apparatusNAGAI SHINJI·Filed 2011·Granted Aug 14, 2012·6 cites·25 claims
- 0785US6130904AGas supplementation method of excimer laser apparatusKOMATSU MFG CO LTD·Filed 1994·Granted Oct 10, 2000·48 cites·17 claims
- 0884US10548209B2Chamber apparatus, target generation method, and EUV light generation apparatusGIGAPHOTON INC·Filed 2019·Granted Jan 28, 2020·2 cites·18 claims
- 0980US8698112B2Extreme ultraviolet light generation apparatusYABU TAKAYUKI·Filed 2012·Granted Apr 15, 2014·5 cites·12 claims
- 1079US8629417B2Extreme ultraviolet light generation apparatusNAGAI SHINJI·Filed 2012·Granted Jan 14, 2014·4 cites·13 claims
- 1178US8569723B2Extreme ultraviolet light source apparatusNAGAI SHINJI·Filed 2011·Granted Oct 29, 2013·4 cites·12 claims
- 1277US8581220B2Target supply apparatus, control system, control apparatus and control circuit thereofISHIHARA TAKANOBU·Filed 2009·Granted Nov 12, 2013·10 cites·7 claims
- 1375US8604451B2Target supply apparatusYABU TAKAYUKI·Filed 2009·Granted Dec 10, 2013·10 cites·26 claims
- 1474US10028365B2Chamber device, target generation method, and extreme ultraviolet light generation systemGIGAPHOTON INC·Filed 2017·Granted Jul 17, 2018·1 cites·14 claims
- 1573US6570899B1Gas laser deviceKOMATSU MFG CO LTD·Filed 2000·Granted May 27, 2003·12 cites·2 claims
- 1672US8705035B2Target generation deviceGIGAPHOTON INC·Filed 2013·Granted Apr 22, 2014·3 cites·4 claims
- 1771US8507883B2Extreme ultraviolet light source apparatusENDO AKIRA·Filed 2009·Granted Aug 13, 2013·8 cites·19 claims
- 1868US8710472B2Target output device and extreme ultraviolet light source apparatusISHIHARA TAKANOBU·Filed 2011·Granted Apr 29, 2014·3 cites·21 claims
- 1968US2024322521A1Electronic device manufacturing method, laser device, and wavelength sequence calculation systemGIGAPHOTON INC·Filed 2024·Application pending·0 cites
- 2059US6628693B1Discharge electrode for laser deviceKOMATSU MFG CO LTD·Filed 2000·Granted Sep 30, 2003·5 cites·2 claims
- 2158US8343429B2Target supply unit of extreme ultraviolet light source apparatus and method of manufacturing the sameGIGAPHOTON INC·Filed 2009·Granted Jan 1, 2013·3 cites·15 claims
- 2256US9338869B2EUV light source apparatusGIGAPHOTON INC·Filed 2015·Granted May 10, 2016·0 cites·5 claims
- 2356US6771685B1Discharge electrodes connecting structure for laser apparatus and laser apparatus therewithKOMATSU MFG CO LTD·Filed 2000·Granted Aug 3, 2004·4 cites·2 claims
- 2453US10524343B2Extreme ultraviolet light generation apparatusGIGAPHOTON INC·Filed 2019·Granted Dec 31, 2019·0 cites·18 claims
- 2553US10237961B2Target supply device, processing device and processing method thereforGIGAPHOTON INC·Filed 2018·Granted Mar 19, 2019·0 cites·14 claims
- 2652US10136509B2Target supply device, processing device and processing method thefeforGIGAPHOTON INC·Filed 2017·Granted Nov 20, 2018·0 cites·19 claims
- 2747US6490310B1Laser discharge electrodes with current return plate structureKOMATSU MFG CO LTD·Filed 2000·Granted Dec 3, 2002·1 cites·4 claims
- 2847US2012311969A1Target supply unit of extreme ultraviolet light source apparatus and method of manufacturing the sameYABU TAKAYUKI·Filed 2012·Application pending·0 cites
- 2945US9233782B2Target supply deviceGIGAPHOTON INC·Filed 2012·Granted Jan 12, 2016·0 cites·6 claims
- 3045US2008095209A1Laser device for exposure deviceUSHIO ELECTRIC INC·Filed 2007·Application pending·0 cites
- 3144US2017203238A1Target generation device, and method for manufacturing filter structureGIGAPHOTON INC·Filed 2017·Application pending·0 cites
- 3239US2018263101A1Target generation device and euv light generation deviceGIGAPHOTON INC·Filed 2018·Application pending·0 cites
- 3339US2013146682A1Target supply deviceGIGAPHOTON INC·Filed 2012·Application pending·0 cites
- 3437US6507596B1Gas laser apparatusKOMATSU MFG CO LTD·Filed 2000·Granted Jan 14, 2003·0 cites·5 claims
- 3533US2015144809A1Target supply device and extreme ultraviolet light generation apparatusGIGAPHOTON INC·Filed 2015·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →