Assignee
YAMAMOTO TARO
JP10 patents
Top patents by PatentIndex Score
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Transport vehicle and transport system
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US8851092B2Oct 7, 2014
Cleaning apparatus and cleaning method, coater/developer and coating and developing method, and computer readable storing medium
YAMAMOTO TARO5 citations70
US8393808B2Mar 12, 2013
Developing method
YAMAMOTO TARO2 citations63
US8387630B2Mar 5, 2013
Protective film removing device, mixed chemical solution recovering method and program storage medium
YAMAMOTO TARO4 citations63
US8069816B2Dec 6, 2011
Coating film processing method and apparatus
YAMAMOTO TARO4 citations63
US8518494B2Aug 27, 2013
Coating and developing apparatus, coating film forming method, and storage medium storing program for performing the method
YAMAMOTO TARO0 citations52
US8171405B2May 1, 2012
Information processing program, information processing method, and information processing device
YAMAMOTO TARO1 citations52
US8920922B2Dec 30, 2014
Polyurethane urea elastic fiber
YAMAMOTO TARO1 citations51
US8445189B2May 21, 2013
Developing device and developing method
YAMAMOTO TARO0 citations51
US8133663B2Mar 13, 2012
Pattern forming method and apparatus
YAMAMOTO TARO0 citations40