Assignee
ALLUXA INC
US·3 granted patents·0 citations·filing 2017–2022
Top patents by PatentIndex Score
3 records- 0174US11932932B2Sputtering system with a plurality of cathode assembliesALLUXA INC·Filed 2022·Granted Mar 19, 2024·0 cites·20 claims
- 0264US10801102B1Cathode assemblies and sputtering systemsALLUXA INC·Filed 2017·Granted Oct 13, 2020·0 cites·30 claims
- 0363US11479847B2Sputtering system with a plurality of cathode assembliesALLUXA INC·Filed 2020·Granted Oct 25, 2022·0 cites·27 claims
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