Assignee

ARAKAWA TAKAHIRO

JP·1 granted patent·0 citations·filing 2008–2008

Technology mixB81B1 C12N1 C23F1 Y10T1

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1 record

0131US8414782B2Process for producing fluorocarbon microstructure, fluorocarbon microstructure, and microsystemARAKAWA TAKAHIRO·Filed 2008·Granted Apr 9, 2013·0 cites·5 claims

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