Assignee
ASML US INC
US·19 granted patents·2 pending applications·944 citations·filing 1998–2005
Top patents by PatentIndex Score
21 records- 0197US6462310B1Hot wall rapid thermal processorASML US INC·Filed 2000·Granted Oct 8, 2002·301 cites·46 claims
- 0294US6476921B1In-situ method and apparatus for end point detection in chemical mechanical polishingASML US INC·Filed 2000·Granted Nov 5, 2002·63 cites·17 claims
- 0393US6521048B2Single body injector and deposition chamberASML US INC·Filed 2001·Granted Feb 18, 2003·71 cites·32 claims
- 0490US6544345B1Method and system for in-situ cleaning of semiconductor manufacturing equipment using combination chemistriesASML US INC·Filed 2000·Granted Apr 8, 2003·67 cites·21 claims
- 0590US6507390B1Method and apparatus for a reticle with purged pellicle-to-reticle gapASML US INC·Filed 2000·Granted Jan 14, 2003·42 cites·28 claims
- 0690US6411426B1Apparatus, system, and method for active compensation of aberrations in an optical systemASML US INC·Filed 2000·Granted Jun 25, 2002·58 cites·10 claims
- 0789US6556281B1Flexible piezoelectric chuck and method of using the sameASML US INC·Filed 2000·Granted Apr 29, 2003·36 cites·5 claims
- 0888US6610150B1Semiconductor wafer processing system with vertically-stacked process chambers and single-axis dual-wafer transfer systemASML US INC·Filed 2000·Granted Aug 26, 2003·56 cites·13 claims
- 0988US6398373B1Pneumatic control system and method for shaping deformable mirrors in lithographic projection systemsASML US INC·Filed 2000·Granted Jun 4, 2002·47 cites·13 claims
- 1087US6660391B1Low κ dielectric inorganic/organic hybrid films and method of makingASML US INC·Filed 1999·Granted Dec 9, 2003·67 cites·8 claims
- 1184US6458013B1Method of chemical mechanical polishingASML US INC·Filed 2000·Granted Oct 1, 2002·35 cites·17 claims
- 1282US7306114B2Non-dripping nozzle apparatusASML US INC·Filed 2005·Granted Dec 11, 2007·7 cites·2 claims
- 1382US6729353B2Modular fluid delivery apparatusASML US INC·Filed 2001·Granted May 4, 2004·29 cites·18 claims
- 1472US6492621B2Hot wall rapid thermal processorASML US INC·Filed 2001·Granted Dec 10, 2002·15 cites·9 claims
- 1561US6533531B1Device for handling wafers in microelectronic manufacturingASML US INC·Filed 1998·Granted Mar 18, 2003·29 cites·14 claims
- 1661US6485783B1Chemical vapor deposition systemASML US INC·Filed 2000·Granted Nov 26, 2002·5 cites·17 claims
- 1759US6509577B1Systems and methods for exposing substrate peripheryASML US INC·Filed 2000·Granted Jan 21, 2003·8 cites·25 claims
- 1849US6667239B2Chemical mechanical polishing of copper-oxide damascene structuresASML US INC·Filed 2002·Granted Dec 23, 2003·5 cites·21 claims
- 1945US6576060B1Protective gas shield apparatusASML US INC·Filed 2000·Granted Jun 10, 2003·3 cites·8 claims
- 2034US2003061991A1Protective shield and system for gas distributionASML US INC·Filed 2002·Application pending·0 cites
- 2133US2004179260A1Optical cubeASML US INC·Filed 2004·Application pending·0 cites
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