US2004179260A1PendingUtilityA1

Optical cube

33
Assignee: ASML US INCPriority: Oct 1, 2002Filed: Mar 25, 2004Published: Sep 16, 2004
Est. expiryOct 1, 2022(expired)· nominal 20-yr term from priority
G02B 27/142G02B 27/283C03C 27/00
33
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Claims

Abstract

A cube used to perform optical functions in a system, such as beam splitting or polarizing, or both, is manufactured by optically contacting a coated prism with an uncoated prism. The coated prism includes a dielectric stack having alternating layers of high and low index of refraction materials. To ensure secure optical contacting between the coated prism and uncoated prism, low interface reflection, and good throughput, a contacting layer is deposited on the dielectric stack. The contacting layer can be fused silica or SiO 2 , which has natural compatibility with the CaF 2 materials that make up the uncoated prism and the coating layers.

Claims

exact text as granted — not AI-modified
What is claimed is:  
     
         1 . A cube comprising: 
 an uncoated prism;    a coated prism coupled to said uncoated prism, the coated prism including, 
 a first coating section having a multi-layered coating, and  
 a second coating section formed on top of said first coating section, said second coating section having a contact layer coating.  
   
     
     
         2 . The cube of  claim 1 , wherein said contact layer coating is a SiO 2  coating.  
     
     
         3 . The cube of  claim 1 , wherein said contact layer coating is a fused silica coating.  
     
     
         4 . The cube of  claim 1 , wherein the cube is a polarizing cube.  
     
     
         5 . The cube of  claim 1 , wherein the cube is a beam splitter.  
     
     
         6 . An optical device comprising: 
 an uncoated optical element;    a coated optical element coupled to a surface of said uncoated optical element, the coated optical element including, 
 a multi-layered coating formed on said surface, and  
 a contact layer coating formed on said multi-layered coating.  
   
     
     
         7 . The device of  claim 6 , wherein said contact layer coating is a SiO 2  coating.  
     
     
         8 . The device of  claim 6 , wherein said contact layer coating is a fused silica coating.  
     
     
         9 . The device of  claim 6 , wherein said uncoated and said coated optical elements are prisms.  
     
     
         10 . The device of  claim 6 , wherein said uncoated optical element and said coated optical element are coupled together to form a polarizing cube.  
     
     
         11 . The device of  claim 6 , wherein said uncoated optical element and said coated optical element are coupled together to form a beam splitter.

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