Assignee
ATTO CO LTD
KR·0 granted patents·5 pending applications·0 citations·filing 2007–2010
Top patents by PatentIndex Score
5 records- 0152US2007221129A1Apparatus for depositing atomic layer using gas separation type showerheadATTO CO LTD·Filed 2007·Application pending·0 cites
- 0252US2007163440A1Gas separation type showerheadATTO CO LTD·Filed 2007·Application pending·0 cites
- 0344US2008260968A1Method of forming amorphous carbon layer using cross type hydrocarbon compound and method of forming low-k dielectric layer using the sameATTO CO LTD·Filed 2007·Application pending·0 cites
- 0443US2007209686A1Apparatus for cleaning chamber using gas separation type showerheadATTO CO LTD·Filed 2007·Application pending·0 cites
- 0529US2011021035A1Deposition apparatus and method of manufacturing semiconductor device using the sameATTO CO LTD·Filed 2010·Application pending·0 cites
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