Assignee
AXCELIS TECH INC
US·346 granted patents·77 pending applications·7,980 citations·filing 1998–2025
Top patents by PatentIndex Score
423 records- 0198US6756085B2Ultraviolet curing processes for advanced low-k materialsAXCELIS TECH INC·Filed 2003·Granted Jun 29, 2004·685 cites·58 claims
- 0298US6709807B2Process for reducing edge roughness in patterned photoresistAXCELIS TECH INC·Filed 2002·Granted Mar 23, 2004·291 cites·16 claims
- 0398US6225745B1Dual plasma source for plasma process chamberAXCELIS TECH INC·Filed 1999·Granted May 1, 2001·490 cites·22 claims
- 0497US11170967B2Liquid metal ion sourceAXCELIS TECH INC·Filed 2020·Granted Nov 9, 2021·9 cites·20 claims
- 0597US6635117B1Actively-cooled distribution plate for reducing reactive gas temperature in a plasma processing systemAXCELIS TECH INC·Filed 2000·Granted Oct 21, 2003·609 cites·9 claims
- 0696US7476855B2Beam tuning with automatic magnet pole rotation for ion implantersAXCELIS TECH INC·Filed 2006·Granted Jan 13, 2009·43 cites·29 claims
- 0796US7135691B2Reciprocating drive for scanning a workpiece through an ion beamAXCELIS TECH INC·Filed 2005·Granted Nov 14, 2006·36 cites·63 claims
- 0895US8035080B2Method and system for increasing beam current above a maximum energy for a charge stateAXCELIS TECH INC·Filed 2009·Granted Oct 11, 2011·26 cites·20 claims
- 0995US7759657B2Methods for implanting B22Hx and its ionized lower mass byproductsAXCELIS TECH INC·Filed 2008·Granted Jul 20, 2010·34 cites·19 claims
- 1095US6770888B1High mass resolution magnet for ribbon beam ion implantersAXCELIS TECH INC·Filed 2003·Granted Aug 3, 2004·51 cites·15 claims
- 1195US6759098B2Plasma curing of MSQ-based porous low-k film materialsAXCELIS TECH INC·Filed 2001·Granted Jul 6, 2004·580 cites·19 claims
- 1295US6305316B1Integrated power oscillator RF source of plasma immersion ion implantation systemAXCELIS TECH INC·Filed 2000·Granted Oct 23, 2001·67 cites·19 claims
- 1395US6237527B1System for improving energy purity and implant consistency, and for minimizing charge accumulation of an implanted substrateAXCELIS TECH INC·Filed 1999·Granted May 29, 2001·281 cites·6 claims
- 1494US7629272B2Ultraviolet assisted porogen removal and/or curing processes for forming porous low k dielectricsAXCELIS TECH INC·Filed 2005·Granted Dec 8, 2009·26 cites·16 claims
- 1594US7399980B2Systems and methods for beam angle adjustment in ion implantersAXCELIS TECH INC·Filed 2007·Granted Jul 15, 2008·20 cites·19 claims
- 1694US7227160B1Systems and methods for beam angle adjustment in ion implantersAXCELIS TECH INC·Filed 2006·Granted Jun 5, 2007·21 cites·20 claims
- 1794US7037846B2Method and apparatus for micro-jet enabled, low energy ion generation and transport in plasma processingAXCELIS TECH INC·Filed 2004·Granted May 2, 2006·98 cites·11 claims
- 1894US7022984B1Biased electrostatic deflectorAXCELIS TECH INC·Filed 2005·Granted Apr 4, 2006·43 cites·19 claims
- 1994US6992311B1In-situ cleaning of beam defining apertures in an ion implanterAXCELIS TECH INC·Filed 2005·Granted Jan 31, 2006·41 cites·19 claims
- 2094US6782843B2Actively-cooled distribution plate for reducing reactive gas temperature in a plasma processing systemAXCELIS TECH INC·Filed 2003·Granted Aug 31, 2004·68 cites·14 claims
- 2194US6768121B2Ion source having replaceable and sputterable solid source materialAXCELIS TECH INC·Filed 2003·Granted Jul 27, 2004·59 cites·9 claims
- 2294US6281135B1Oxygen free plasma stripping processAXCELIS TECH INC·Filed 1999·Granted Aug 28, 2001·309 cites·23 claims
- 2394US6101971AIon implantation control using charge collection, optical emission spectroscopy and mass analysisAXCELIS TECH INC·Filed 1998·Granted Aug 15, 2000·142 cites·7 claims
- 2493US6777696B1Deflecting acceleration/deceleration gapAXCELIS TECH INC·Filed 2003·Granted Aug 17, 2004·71 cites·12 claims
- 2593US6664737B1Dielectric barrier discharge apparatus and process for treating a substrateAXCELIS TECH INC·Filed 2002·Granted Dec 16, 2003·51 cites·21 claims
- 2693US6288403B1Decaborane ionizerAXCELIS TECH INC·Filed 1999·Granted Sep 11, 2001·89 cites·10 claims
- 2792US7789443B2Workpiece gripping deviceAXCELIS TECH INC·Filed 2007·Granted Sep 7, 2010·28 cites·3 claims
- 2892US7547899B2Charged beam dump and particle attractorAXCELIS TECH INC·Filed 2006·Granted Jun 16, 2009·12 cites·28 claims
- 2992US6835930B2High mass resolution magnet for ribbon beam ion implantersAXCELIS TECH INC·Filed 2004·Granted Dec 28, 2004·33 cites·11 claims
- 3092US6761796B2Method and apparatus for micro-jet enabled, low-energy ion generation transport in plasma processingAXCELIS TECH INC·Filed 2001·Granted Jul 13, 2004·75 cites·11 claims
- 3192US6583544B1Ion source having replaceable and sputterable solid source materialAXCELIS TECH INC·Filed 2000·Granted Jun 24, 2003·44 cites·13 claims
- 3291US10074508B2Low conductance self-shielding insulator for ion implantation systemsAXCELIS TECH INC·Filed 2016·Granted Sep 11, 2018·6 cites·20 claims
- 3391US8502173B2System and method for ion implantation with improved productivity and uniformityAXCELIS TECH INC·Filed 2012·Granted Aug 6, 2013·17 cites·38 claims
- 3491US7949425B2High throughput wafer notch alignerAXCELIS TECH INC·Filed 2006·Granted May 24, 2011·18 cites·37 claims
- 3591US7915597B2Extraction electrode system for high current ion implanterAXCELIS TECH INC·Filed 2008·Granted Mar 29, 2011·19 cites·20 claims
- 3691US7361914B2Means to establish orientation of ion beam to wafer and correct angle errorsAXCELIS TECH INC·Filed 2005·Granted Apr 22, 2008·15 cites·18 claims
- 3791US6759665B2Method and system for ion beam containment in an ion beam guideAXCELIS TECH INC·Filed 2001·Granted Jul 6, 2004·34 cites·16 claims
- 3891US6638875B2Oxygen free plasma stripping processAXCELIS TECH INC·Filed 2001·Granted Oct 28, 2003·69 cites·6 claims
- 3991US6582891B1Process for reducing edge roughness in patterned photoresistAXCELIS TECH INC·Filed 2000·Granted Jun 24, 2003·36 cites·21 claims
- 4091US6414329B1Method and system for microwave excitation of plasma in an ion beam guideAXCELIS TECH INC·Filed 2000·Granted Jul 2, 2002·32 cites·25 claims
- 4190US10128084B1Wafer temperature control with consideration to beam power inputAXCELIS TECH INC·Filed 2017·Granted Nov 13, 2018·11 cites·18 claims
- 4290US10037877B1Ion implantation system having beam angle control in drift and deceleration modesAXCELIS TECH INC·Filed 2017·Granted Jul 31, 2018·6 cites·20 claims
- 4390US7615763B2System for magnetic scanning and correction of an ion beamAXCELIS TECH INC·Filed 2006·Granted Nov 10, 2009·16 cites·27 claims
- 4490US6881966B2Hybrid magnetic/electrostatic deflector for ion implantation systemsAXCELIS TECH INC·Filed 2003·Granted Apr 19, 2005·35 cites·34 claims
- 4589US11646175B2Method of mixing upstream and downstream current measurements for inference of the beam current at the bend of an optical element for realtime dose controlAXCELIS TECH INC·Filed 2020·Granted May 9, 2023·4 cites·19 claims
- 4689US7589333B2Methods for rapidly switching off an ion beamAXCELIS TECH INC·Filed 2006·Granted Sep 15, 2009·12 cites·19 claims
- 4789US7402821B2Application of digital frequency and phase synthesis for control of electrode voltage phase in a high-energy ion implantation machine, and a means for accurate calibration of electrode voltage phaseAXCELIS TECH INC·Filed 2006·Granted Jul 22, 2008·26 cites·15 claims
- 4889US7323695B2Reciprocating drive for scanning a workpieceAXCELIS TECH INC·Filed 2005·Granted Jan 29, 2008·11 cites·25 claims
- 4989US7246985B2Work-piece processing systemAXCELIS TECH INC·Filed 2004·Granted Jul 24, 2007·40 cites·23 claims
- 5089US7141809B2Method for reciprocating a workpiece through an ion beamAXCELIS TECH INC·Filed 2005·Granted Nov 28, 2006·12 cites·20 claims
Showing the top 50 of 423 patent records by PatentIndex Score.
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