Assignee
BROEKAART MARCEL
FR·5 granted patents·2 pending applications·48 citations·filing 2008–2011
Top patents by PatentIndex Score
7 records- 0193US8575002B2Direct bonding method with reduction in overlay misalignmentBROEKAART MARCEL·Filed 2011·Granted Nov 5, 2013·26 cites·18 claims
- 0283US8679944B2Progressive trimming methodBROEKAART MARCEL·Filed 2009·Granted Mar 25, 2014·17 cites·17 claims
- 0375US9733075B2System and method for assessing inhomogeneous deformations in multilayer platesBROEKAART MARCEL·Filed 2011·Granted Aug 15, 2017·3 cites·19 claims
- 0470US8338266B2Method for molecular adhesion bonding at low pressureBROEKAART MARCEL·Filed 2011·Granted Dec 25, 2012·2 cites·15 claims
- 0552US8232130B2Process for assembling wafers by means of molecular adhesionBROEKAART MARCEL·Filed 2008·Granted Jul 31, 2012·0 cites·13 claims
- 0651US2012067524A1Apparatus for manufacturing semiconductor devicesBROEKAART MARCEL·Filed 2011·Application pending·0 cites
- 0750US2011308721A1Apparatus for manufacturing semiconductor devicesBROEKAART MARCEL·Filed 2010·Application pending·0 cites
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