Assignee
CARL ZEISS MULTISEM GMBH
DE·33 granted patents·50 pending applications·171 citations·filing 2019–2025
Top patents by PatentIndex Score
83 records- 0198US11239053B2Charged particle beam system and methodCARL ZEISS MULTISEM GMBH·Filed 2020·Granted Feb 1, 2022·10 cites·27 claims
- 0297US11158482B2Multi-beam particle microscopeCARL ZEISS MULTISEM GMBH·Filed 2020·Granted Oct 26, 2021·7 cites·22 claims
- 0396US11562881B2Charged particle beam systemCARL ZEISS MULTISEM GMBH·Filed 2021·Granted Jan 24, 2023·3 cites·26 claims
- 0496US11164715B2Charged particle beam systemCARL ZEISS MULTISEM GMBH·Filed 2020·Granted Nov 2, 2021·4 cites·23 claims
- 0596US11049686B2Particle beam system and method for the particle-optical examination of an objectCARL ZEISS MULTISEM GMBH·Filed 2019·Granted Jun 29, 2021·17 cites·23 claims
- 0696US10811215B2Charged particle beam systemCARL ZEISS MULTISEM GMBH·Filed 2019·Granted Oct 20, 2020·35 cites·20 claims
- 0795US11087955B2System combination of a particle beam system and a light-optical system with collinear beam guidance, and use of the system combinationCARL ZEISS MULTISEM GMBH·Filed 2020·Granted Aug 10, 2021·8 cites·28 claims
- 0894US11735393B2Method for operating a multi-beam particle beam microscopeCARL ZEISS MULTISEM GMBH·Filed 2021·Granted Aug 22, 2023·5 cites·24 claims
- 0994US10896800B2Charged particle beam system and methodCARL ZEISS MULTISEM GMBH·Filed 2019·Granted Jan 19, 2021·44 cites·20 claims
- 1094US10854423B2Multi-beam particle beam systemCARL ZEISS MULTISEM GMBH·Filed 2019·Granted Dec 1, 2020·31 cites·22 claims
- 1191US12094683B2Method for operating a multi-beam particle beam microscopeCARL ZEISS MULTISEM GMBH·Filed 2023·Granted Sep 17, 2024·1 cites·20 claims
- 1291US11069508B2Method of imaging a 3D sample with a multi-beam particle microscopeCARL ZEISS MULTISEM GMBH·Filed 2020·Granted Jul 20, 2021·4 cites·23 claims
- 1391US2026081105A1Multiple particle beam microscope and associated method with fast autofocus around an adjustable working distanceCARL ZEISS MULTISEM GMBH·Filed 2025·Application pending·0 cites
- 1489US11657999B2Particle beam system and method for the particle-optical examination of an objectCARL ZEISS MULTISEM GMBH·Filed 2021·Granted May 23, 2023·1 cites·20 claims
- 1589US2025379030A1Particle beam systemCARL ZEISS MULTISEM GMBH·Filed 2025·Application pending·0 cites
- 1684US12488958B2Method for operating a multi-beam particle beam microscopeCARL ZEISS MULTISEM GMBH·Filed 2024·Granted Dec 2, 2025·0 cites·20 claims
- 1782US11562880B2Particle beam system for adjusting the current of individual particle beamsCARL ZEISS MULTISEM GMBH·Filed 2021·Granted Jan 24, 2023·1 cites·24 claims
- 1882US2024347316A1Method for operating a multiple particle beam system while altering the numerical aperture, associated computer program product and multiple particle beam systemCARL ZEISS MULTISEM GMBH·Filed 2024·Application pending·0 cites
- 1982US2026024721A1High throughput multi-beam charged particle inspection system with dynamic controlCARL ZEISS MULTISEM GMBH·Filed 2025·Application pending·0 cites
- 2081US2025210302A1Method for voltage contrast imaging with a corpuscular multi-beam microscope, corpuscular multi-beam microscope for voltage contrast imaging and semiconductor structures for voltage contrast imaging with a corpuscular multi-beam microscopeCARL ZEISS MULTISEM GMBH·Filed 2024·Application pending·0 cites
- 2180US2025232951A1Particle beam systemCARL ZEISS MULTISEM GMBH·Filed 2025·Application pending·0 cites
- 2276US12494343B2Multiple particle beam microscope and associated method with fast autofocus around an adjustable working distanceCARL ZEISS MULTISEM GMBH·Filed 2023·Granted Dec 9, 2025·0 cites·21 claims
- 2376US2024203687A1Multi-beam particle microscope with improved beam current controlCARL ZEISS MULTISEM GMBH·Filed 2024·Application pending·0 cites
- 2475US12300462B2System comprising a multi-beam particle microscope and method for operating the sameCARL ZEISS MULTISEM GMBH·Filed 2024·Granted May 13, 2025·0 cites·20 claims
- 2575US12057290B2Method for operating a multiple particle beam system while altering the numerical aperture, associated computer program product and multiple particle beam systemCARL ZEISS MULTISEM GMBH·Filed 2022·Granted Aug 6, 2024·0 cites·22 claims
- 2675US2026081097A1Method for the automated mechanical adjustment of a particle beam column, associated computer program product and particle beam columnCARL ZEISS MULTISEM GMBH·Filed 2025·Application pending·0 cites
- 2774US2026011526A1Multi-beam particle beam system and method for operating the sameCARL ZEISS MULTISEM GMBH·Filed 2025·Application pending·0 cites
- 2873US12119204B2Particle beam system and the use thereof for flexibly setting the current intensity of individual particle beamsCARL ZEISS MULTISEM GMBH·Filed 2022·Granted Oct 15, 2024·0 cites·21 claims
- 2972US2025349497A1Method for designing a multi-beam particle beam system having monolithic path trajectory correction plates, computer program product and multi-beam particle beam systemCARL ZEISS MULTISEM GMBH·Filed 2025·Application pending·0 cites
- 3072US2024128048A1Method for operating a multi-beam particle microscope with fast closed-loop beam current control, computer program product and multi-beam particle microscopeCARL ZEISS MULTISEM GMBH·Filed 2023·Application pending·0 cites
- 3172US2026094783A1Multiple particle beam system, in particular multi-beam particle microscope, having a fast magnetic lens and the use thereofCARL ZEISS MULTISEM GMBH·Filed 2025·Application pending·0 cites
- 3271US12293896B2Particle beam systemCARL ZEISS MULTISEM GMBH·Filed 2020·Granted May 6, 2025·0 cites·33 claims
- 3371US2025349500A1Multi-beam charged particle microscope design with a detection unit for fast compensation of charging effectsCARL ZEISS MULTISEM GMBH·Filed 2025·Application pending·0 cites
- 3471US2022254600A1Method for voltage contrast imaging with a corpuscular multi-beam microscope, corpuscular multi-beam microscope for voltage contrast imaging and semiconductor structures for voltage contrast imaging with a corpuscular multi-beam microscopeCARL ZEISS MULTISEM GMBH·Filed 2022·Application pending·0 cites
- 3571US2026074140A1Multi-beam charged particle microscope for inspection with increased throughputCARL ZEISS MULTISEM GMBH·Filed 2025·Application pending·0 cites
- 3670US2025343021A1Fast closed-loop control of multi-beam charged particle systemCARL ZEISS MULTISEM GMBH·Filed 2025·Application pending·0 cites
- 3768US11521827B2Method of imaging a 2D sample with a multi-beam particle microscopeCARL ZEISS MULTISEM GMBH·Filed 2021·Granted Dec 6, 2022·0 cites·15 claims
- 3868US2025372343A1Multi-beam charged particle microscope design with adaptive detection systemCARL ZEISS MULTISEM GMBH·Filed 2025·Application pending·0 cites
- 3968US2025266241A1Multi-beam charged particle imaging system with reduced charging effectsCARL ZEISS MULTISEM GMBH·Filed 2025·Application pending·0 cites
- 4068US2025299905A1Multi-beam charged particle microscope design with detection system for fast charge compensationCARL ZEISS MULTISEM GMBH·Filed 2025·Application pending·0 cites
- 4167US11239054B2Multi-beam particle beam systemCARL ZEISS MULTISEM GMBH·Filed 2020·Granted Feb 1, 2022·0 cites·21 claims
- 4267US2023043036A1High throughput multi-beam charged particle inspection system with dynamic controlCARL ZEISS MULTISEM GMBH·Filed 2022·Application pending·0 cites
- 4366US11087948B2Multi-beam charged particle systemCARL ZEISS MULTISEM GMBH·Filed 2020·Granted Aug 10, 2021·0 cites·20 claims
- 4466US2025104966A1Multi-beam charged particle imaging system with improved imaging of secondary electron beamlets on a detectorCARL ZEISS MULTISEM GMBH·Filed 2024·Application pending·0 cites
- 4566US2025132124A1Multi-beam charged particle microscope design with mirror for field curvature correctionCARL ZEISS MULTISEM GMBH·Filed 2024·Application pending·0 cites
- 4666US2026011524A1Multi-beam particle microscope with a quickly replaceable particle source, and method for quickly replacing a particle source in the multi-beam particle microscopeCARL ZEISS MULTISEM GMBH·Filed 2025·Application pending·0 cites
- 4765US11935721B2System comprising a multi-beam particle microscope and method for operating the sameCARL ZEISS MULTISEM GMBH·Filed 2021·Granted Mar 19, 2024·0 cites·21 claims
- 4865US2025343025A1Multi-beam particle microscope with improved multi-beam generator for field curvature correction and multi-beam generatorCARL ZEISS MULTISEM GMBH·Filed 2025·Application pending·0 cites
- 4964US2025104961A1Method for operating a multi-beam particle microscope, computer program product and multi-beam particle microscopeCARL ZEISS MULTISEM GMBH·Filed 2024·Application pending·0 cites
- 5064US2025385069A1Monitoring of imaging parameters of scanning electron microscopyCARL ZEISS MULTISEM GMBH·Filed 2025·Application pending·0 cites
Showing the top 50 of 83 patent records by PatentIndex Score.
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