Assignee
CHEN ZHIGANG
US·6 granted patents·2 pending applications·62 citations·filing 2008–2012
Top patents by PatentIndex Score
8 records- 0196US8313664B2Efficient and accurate method for real-time prediction of the self-bias voltage of a wafer and feedback control of ESC voltage in plasma processing chamberCHEN ZHIGANG·Filed 2009·Granted Nov 20, 2012·44 cites·8 claims
- 0288US8815969B2Plant oil-based UV-curable coatingCHEN ZHIGANG·Filed 2012·Granted Aug 26, 2014·4 cites·12 claims
- 0388US8206552B2RF power delivery system in a semiconductor apparatusCHEN ZHIGANG·Filed 2008·Granted Jun 26, 2012·9 cites·15 claims
- 0478US9187603B2Bio-based branched and hyperbranched polymers and oligomersCHEN ZHIGANG·Filed 2012·Granted Nov 17, 2015·2 cites·21 claims
- 0574US8932429B2Electronic knob for tuning radial etch non-uniformity at VHF frequenciesCHEN ZHIGANG·Filed 2012·Granted Jan 13, 2015·3 cites·12 claims
- 0653US2012241091A1Rf power delivery system in a semiconductor apparatusCHEN ZHIGANG·Filed 2012·Application pending·0 cites
- 0748US8982073B2Method and terminal for displaying picture/interfaceCHEN ZHIGANG·Filed 2012·Granted Mar 17, 2015·0 cites·15 claims
- 0841US2015370473A1Using a symbol recognition engineCHEN ZHIGANG·Filed 2012·Application pending·0 cites
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