Assignee
CHOPRA DINESH
US·1 granted patent·1 pending application·0 citations·filing 2004–2006
Top patents by PatentIndex Score
2 records- 0145US2006276115A1Apparatus and method for conditioning polishing surface, and polishing apparatus and method of operationCHOPRA DINESH·Filed 2006·Application pending·0 cites
- 0238US8557132B2Inline monitoring of pad loading for CuCMP and developing an endpoint technique for cleaningCHOPRA DINESH·Filed 2004·Granted Oct 15, 2013·0 cites·22 claims
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