Assignee
EBARA CORP
JP·2,343 granted patents·600 pending applications·41,471 citations·filing 1977–2025
Top patents by PatentIndex Score
2,943 records- 0199US11583973B2Polishing apparatusEBARA CORP·Filed 2020·Granted Feb 21, 2023·4 cites·14 claims
- 0299US9782870B2Polishing method and polishing apparatusEBARA CORP·Filed 2014·Granted Oct 10, 2017·34 cites·4 claims
- 0399USD793976SSubstrate retaining ringEBARA CORP·Filed 2016·Granted Aug 8, 2017·434 cites·1 claims
- 0499USD634719SElastic membrane for semiconductor wafer polishing apparatusEBARA CORP·Filed 2010·Granted Mar 22, 2011·539 cites·1 claims
- 0599USD633452SElastic membrane for semiconductor wafer polishing apparatusEBARA CORP·Filed 2010·Granted Mar 1, 2011·342 cites·1 claims
- 0699US7420164B2Objective lens, electron beam system and method of inspecting defectEBARA CORP·Filed 2005·Granted Sep 2, 2008·68 cites·1 claims
- 0799US7109483B2Method for inspecting substrate, substrate inspecting system and electron beam apparatusEBARA CORP·Filed 2001·Granted Sep 19, 2006·159 cites·9 claims
- 0899US6861642B2Neutral particle beam processing apparatusEBARA CORP·Filed 2002·Granted Mar 1, 2005·421 cites·4 claims
- 0999US6849857B2Beam processing apparatusEBARA CORP·Filed 2002·Granted Feb 1, 2005·352 cites·10 claims
- 1098US11450544B2Substrate processing apparatus, substrate processing system, and substrate processing methodEBARA CORP·Filed 2020·Granted Sep 20, 2022·8 cites·10 claims
- 1198US9539699B2Polishing methodEBARA CORP·Filed 2015·Granted Jan 10, 2017·16 cites·20 claims
- 1298US9368314B2Inspection system by charged particle beam and method of manufacturing devices using the systemEBARA CORP·Filed 2014·Granted Jun 14, 2016·38 cites·10 claims
- 1398US7822500B2Polishing apparatus and polishing methodEBARA CORP·Filed 2005·Granted Oct 26, 2010·50 cites·27 claims
- 1498US7601972B2Inspection system by charged particle beam and method of manufacturing devices using the systemEBARA CORP·Filed 2007·Granted Oct 13, 2009·49 cites·8 claims
- 1598US7138629B2Testing apparatus using charged particles and device manufacturing method using the testing apparatusEBARA CORP·Filed 2004·Granted Nov 21, 2006·151 cites·22 claims
- 1698US6717189B2Electroless plating liquid and semiconductor deviceEBARA CORP·Filed 2001·Granted Apr 6, 2004·314 cites·9 claims
- 1798US6676716B2Method and apparatus for treating wastes by gasificationEBARA CORP·Filed 2001·Granted Jan 13, 2004·92 cites·17 claims
- 1898US6593152B2Electron beam apparatus and method of manufacturing semiconductor device using the apparatusEBARA CORP·Filed 2001·Granted Jul 15, 2003·109 cites·60 claims
- 1998US6488774B1Trap apparatusEBARA CORP·Filed 2000·Granted Dec 3, 2002·378 cites·8 claims
- 2098US6464825B1Substrate processing apparatus including a magnetically levitated and rotated substrate holderEBARA CORP·Filed 2000·Granted Oct 15, 2002·330 cites·13 claims
- 2198US5950925AReactant gas ejector headEBARA CORP·Filed 1997·Granted Sep 14, 1999·697 cites·8 claims
- 2298US5838447APolishing apparatus including thickness or flatness detectorEBARA CORP·Filed 1996·Granted Nov 17, 1998·336 cites·39 claims
- 2398US5728223AReactant gas ejector head and thin-film vapor deposition apparatusEBARA CORP·Filed 1996·Granted Mar 17, 1998·674 cites·28 claims
- 2498US4876006AHollow fiber filter deviceEBARA CORP·Filed 1988·Granted Oct 24, 1989·254 cites·10 claims
- 2598US4806080APump with shaftless impellerEBARA CORP·Filed 1987·Granted Feb 21, 1989·201 cites·23 claims
- 2697US10035238B2Polishing method and polishing apparatusEBARA CORP·Filed 2017·Granted Jul 31, 2018·15 cites·5 claims
- 2797USD777546SWork holder for polishing apparatusEBARA CORP·Filed 2015·Granted Jan 31, 2017·407 cites·1 claims
- 2897US7928382B2Detector and inspecting apparatusEBARA CORP·Filed 2006·Granted Apr 19, 2011·51 cites·22 claims
- 2997US7741601B2Testing apparatus using charged particles and device manufacturing method using the testing apparatusEBARA CORP·Filed 2008·Granted Jun 22, 2010·36 cites·13 claims
- 3097US7682225B2Polishing apparatus and substrate processing apparatusEBARA CORP·Filed 2005·Granted Mar 23, 2010·46 cites·5 claims
- 3197US7365324B2Testing apparatus using charged particles and device manufacturing method using the testing apparatusEBARA CORP·Filed 2006·Granted Apr 29, 2008·49 cites·7 claims
- 3297US7351969B2Electron beam inspection system and inspection method and method of manufacturing devices using the systemEBARA CORP·Filed 2005·Granted Apr 1, 2008·37 cites·5 claims
- 3397US7297949B2Inspection system by charged particle beam and method of manufacturing devices using the systemEBARA CORP·Filed 2006·Granted Nov 20, 2007·28 cites·6 claims
- 3497US7244932B2Electron beam apparatus and device fabrication method using the electron beam apparatusEBARA CORP·Filed 2001·Granted Jul 17, 2007·74 cites·51 claims
- 3597US7223973B2Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using formerEBARA CORP·Filed 2005·Granted May 29, 2007·38 cites·10 claims
- 3697US7220604B2Method and apparatus for repairing shape, and method for manufacturing semiconductor device using thoseEBARA CORP·Filed 2005·Granted May 22, 2007·59 cites·11 claims
- 3797US7135676B2Inspection system by charged particle beam and method of manufacturing devices using the systemEBARA CORP·Filed 2001·Granted Nov 14, 2006·61 cites·12 claims
- 3897US6855929B2Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using formerEBARA CORP·Filed 2001·Granted Feb 15, 2005·106 cites·55 claims
- 3997US6758876B2Substrate transport apparatus, pod and methodEBARA CORP·Filed 2001·Granted Jul 6, 2004·148 cites·58 claims
- 4097US6632335B2Plating apparatusEBARA CORP·Filed 2000·Granted Oct 14, 2003·114 cites·77 claims
- 4197US6282368B1Liquid feed vaporization system and gas injection deviceEBARA CORP·Filed 2000·Granted Aug 28, 2001·104 cites·5 claims
- 4297US6176929B1Thin-film deposition apparatusEBARA CORP·Filed 1998·Granted Jan 23, 2001·340 cites·32 claims
- 4397US5951923AVaporizer apparatus and film deposition apparatus therewithEBARA CORP·Filed 1997·Granted Sep 14, 1999·275 cites·45 claims
- 4497US5846062ATwo stage screw type vacuum pump with motor in-between the stagesEBARA CORP·Filed 1997·Granted Dec 8, 1998·163 cites·9 claims
- 4597US5672091APolishing apparatus having endpoint detection deviceEBARA CORP·Filed 1995·Granted Sep 30, 1997·212 cites·12 claims
- 4696US11698080B2Sealing systemEBARA CORP·Filed 2022·Granted Jul 11, 2023·3 cites·8 claims
- 4796US10665487B2Substrate processing apparatus, substrate processing system, and substrate processing methodEBARA CORP·Filed 2015·Granted May 26, 2020·8 cites·34 claims
- 4896US10442056B2Substrate holding apparatus and polishing apparatusEBARA CORP·Filed 2013·Granted Oct 15, 2019·16 cites·29 claims
- 4996US10016871B2Polishing apparatus and controlling the sameEBARA CORP·Filed 2015·Granted Jul 10, 2018·8 cites·19 claims
- 5096US9943943B2Method and apparatus for monitoring a polishing surface of a polishing pad used in polishing apparatusEBARA CORP·Filed 2016·Granted Apr 17, 2018·7 cites·19 claims
Showing the top 50 of 2,943 patent records by PatentIndex Score.
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