Assignee
EDWARDS VACUUM INC
US·8 granted patents·1 pending application·31 citations·filing 2000–2012
Top patents by PatentIndex Score
9 records- 0178US7438534B2Wide range pressure control using turbo pumpEDWARDS VACUUM INC·Filed 2005·Granted Oct 21, 2008·10 cites·4 claims
- 0265US7398127B2Systems and methods for facilitating wireless communication between various components of a distributed systemEDWARDS VACUUM INC·Filed 2005·Granted Jul 8, 2008·6 cites·20 claims
- 0364US7404698B2Turbomolecular pump with static charge controlEDWARDS VACUUM INC·Filed 2005·Granted Jul 29, 2008·3 cites·10 claims
- 0455US7625540B2Fluorine removal by ion exchangeEDWARDS VACUUM INC·Filed 2000·Granted Dec 1, 2009·2 cites·14 claims
- 0553US7541061B2Vacuum chamber load lock structure and article transport mechanismEDWARDS VACUUM INC·Filed 2003·Granted Jun 2, 2009·4 cites·2 claims
- 0642US7470413B2Fluorine removal by ion exchangeEDWARDS VACUUM INC·Filed 2004·Granted Dec 30, 2008·0 cites·5 claims
- 0739US7539459B2Active noise cancellation system, arrangement, and methodEDWARDS VACUUM INC·Filed 2004·Granted May 26, 2009·4 cites·18 claims
- 0836US2014112650A1Cartridge heater apparatusEDWARDS VACUUM INC·Filed 2012·Application pending·0 cites
- 0934US7500822B2Combined vacuum pump load-lock assemblyEDWARDS VACUUM INC·Filed 2004·Granted Mar 10, 2009·2 cites·19 claims
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