Cartridge heater apparatus

Abstract

A cartridge heater apparatus includes a tube; a heating cartridge adapted to be inserted into the tube for heating fluid passing through a passage space between the heating cartridge and the tube, the heating cartridge being secured at a first end thereof in a cantilever manner; and means for supporting the heating cartridge in the tube at a location distant from the first end, without blocking the fluid passing through the passage space between the heating cartridge and the tube.

What is claimed is: 
     
         1 . A cartridge heater apparatus comprising:
 a tube;   a heating cartridge adapted to be inserted into the tube for heating fluid passing through a passage space between the heating cartridge and the tube, the heating cartridge being secured at a first end thereof in a cantilever manner; and   means for supporting the heating cartridge in the tube at a location distant from the first end, without blocking the fluid passing through the passage space between the heating cartridge and the tube.   
     
     
         2 . The cartridge heater apparatus of  claim 1 , wherein the means comprises at lease one recessed portion on an inner wall of the tube in contact with the heating cartridge inserted in the tube. 
     
     
         3 . The cartridge heater of apparatus of  claim 2 , wherein the means comprises at least three said recessed portions spread around the heating cartridge at the same location in an axial direction of the tube. 
     
     
         4 . The cartridge heater apparatus of  claim 1 , wherein the means comprises at least one protrusion on a surface of the heating cartridge in contact with an inner watt of the tube. 
     
     
         5 . The cartridge heater apparatus of  claim 4 , wherein the means comprises at least three said protrusions spread around the heating cartridge at the same location in an axial direction of the same. 
     
     
         6 . The cartridge heater apparatus of  claim 4 , wherein the protrusion is an integral or separate part of the heating cartridge. 
     
     
         7 . The cartridge heater apparatus of  claim 1 , wherein the means comprises a spacer adapted to be placed between an inner wall of the tube and the heating cartridge, the spacer having one or more openings for allowing the fluid to pass therethrough. 
     
     
         8 . The cartridge heater apparatus of  claim 1 , wherein the tube has an inlet disposed between the first end and the means. 
     
     
         9 . The cartridge heater apparatus of  claim 1 , wherein the heating cartridge has a cylinder-shaped body enclosing an electrical resistor adapted to be connected to a power supply. 
     
     
         10 . The cartridge heater apparatus of  claim 9  further comprising a thermal couple fluidly connected to the tube for generating a first signal indicative of a temperature of the fluid in the tube. 
     
     
         11 . The cartridge heater apparatus of  claim 10  further comprising a controller for controlling the power provided to the heating cartridge from the power supply in response to the first signal. 
     
     
         12 . The cartridge heater apparatus of  claim 9  further comprising an over-temperature protection switch attached onto an outer surface of the tube for generating a second signal indicative of a temperature of the tube. 
     
     
         13 . The cartridge heater apparatus of  claim 12  further comprising a controller for switching off the power provided to the heating cartridge from the power supply when the second signal exceeds a predetermined threshold value. 
     
     
         14 . A system comprising:
 a process chamber;   a vacuum pump arrangement connected to an outlet of the process chamber for evacuating fluid from the process chamber;   an abatement device connected to an outlet of the vacuum pump arrangement via a tube for treating exhaust fluid emitted from the vacuum pump arrangement;   a heating cartridge adapted to be inserted into the tube for heating the exhaust fluid passing through a passage space between the heating cartridge and the tube, the heating cartridge being secured at a first end thereof in a cantilever manner; and   means for supporting the heating cartridge in the tube at a location distant from the first end, without blocking the exhaust fluid passing through the passage space between the heating cartridge and the tube.   
     
     
         15 . The system of  claim 14 , wherein the means comprises at lease one recessed portion on an inner wall of the tube in contact with the heating cartridge inserted in the tube. 
     
     
         16 . The system of  claim 15 , wherein the means comprises at least three said recessed portions spread around the heating cartridge at the same location in an axial direction of the tube. 
     
     
         17 . The system of  claim 14 , wherein the means comprises at least one protrusion on a surface of the heating cartridge in contact with an inner wall of the tube. 
     
     
         18 . The system of  claim 17 , wherein the means comprises at least three said protrusions spread around the heating cartridge at the same location in an axial direction of the same. 
     
     
         19 . The system of  claim 14 , wherein the means comprises a spacer adapted to be placed between an inner wall of the tube and the heating cartridge, the spacer having one or more openings for allowing the exhaust fluid to pass therethrough. 
     
     
         20 . The system of  claim 14 , wherein the tube has an inlet disposed between the first end and the means. 
     
     
         21 . The system of  claim 14 , wherein the heating cartridge has a cylinder-shaped body enclosing an electrical resistor adapted to be connected to a power supply. 
     
     
         22 . The system of  claim 21  further comprising a thermal couple fluidly connected to the tube for generating a first signal indicative of a temperature of the exhaust fluid in the tube. 
     
     
         23 . The system of  claim 22  further comprising a controller for controlling the power provided to the heating cartridge from the power supply in response to the first signal. 
     
     
         24 . The system of  claim 21  further comprising an over-temperature protection switch attached onto an outer surface of the tube for generating a second signal indicative of a temperature of the tube. 
     
     
         25 . The system of  claim 24  further comprising a controller for switching off the power provided to the heating cartridge from the power supply when the second signal exceeds a predetermined threshold value.