Assignee
EVATEC AG
CH·32 granted patents·29 pending applications·51 citations·filing 2014–2024
Top patents by PatentIndex Score
61 records- 0193US10388559B2Apparatus for depositing a layer on a substrate in a processing gasEVATEC AG·Filed 2016·Granted Aug 20, 2019·13 cites·15 claims
- 0292US10202682B2Method of sputtering and sputter systemEVATEC AG·Filed 2017·Granted Feb 12, 2019·12 cites·24 claims
- 0392US10138553B2Vacuum treatment apparatusEVATEC AG·Filed 2016·Granted Nov 27, 2018·12 cites·17 claims
- 0489US11380530B2Reactive sputtering with HIPIMSEVATEC AG·Filed 2020·Granted Jul 5, 2022·2 cites·23 claims
- 0582US10403522B2Chamber for degassing substratesEVATEC AG·Filed 2018·Granted Sep 3, 2019·2 cites·24 claims
- 0677US11776825B2Chamber for degassing substratesEVATEC AG·Filed 2016·Granted Oct 3, 2023·2 cites·33 claims
- 0777US11217434B2RF capacitive coupled dual frequency etch reactorEVATEC AG·Filed 2017·Granted Jan 4, 2022·2 cites·33 claims
- 0876US10580671B2Chamber for degassing substratesEVATEC AG·Filed 2019·Granted Mar 3, 2020·1 cites·20 claims
- 0972US11551950B2Substrate processing apparatus and method of processing a substrate and of manufacturing a processed workpieceEVATEC AG·Filed 2018·Granted Jan 10, 2023·2 cites·22 claims
- 1071US9624572B2Method of HIPIMS sputtering and HIPIMS sputter systemEVATEC AG·Filed 2014·Granted Apr 18, 2017·2 cites·21 claims
- 1171US2023395402A1Chamber for degassing substratesEVATEC AG·Filed 2023·Application pending·0 cites
- 1270US9934992B2Chamber for degassing substratesEVATEC AG·Filed 2015·Granted Apr 3, 2018·1 cites·24 claims
- 1370US2024186064A1Soft magnetic multilayer desposition apparatus, methods of manufacturing and magnetic multilayerEVATEC AG·Filed 2024·Application pending·0 cites
- 1467US11848179B2Methods of and apparatus for magnetron sputteringEVATEC AG·Filed 2022·Granted Dec 19, 2023·0 cites·31 claims
- 1561US2026015711A1Process to deposit quantized nano layers by magnetron sputteringEVATEC AG·Filed 2023·Application pending·0 cites
- 1660US12595550B2Vacuum layer deposition apparatus and method of depositing a layer on a substrate, especially on a substrate comprising indentations in the surface to be coatedEVATEC AG·Filed 2023·Granted Apr 7, 2026·0 cites·35 claims
- 1759US10590538B2Vacuum treatment apparatusEVATEC AG·Filed 2018·Granted Mar 17, 2020·0 cites·17 claims
- 1858US11211234B2Arc suppression and pulsing in high power impulse magnetron sputtering (HIPIMS)EVATEC AG·Filed 2016·Granted Dec 28, 2021·0 cites·8 claims
- 1954US12272525B2Sputtering apparatus for coating of 3D-objectsEVATEC AG·Filed 2022·Granted Apr 8, 2025·0 cites·21 claims
- 2054US11469085B2Vacuum plasma workpiece treatment apparatusEVATEC AG·Filed 2017·Granted Oct 11, 2022·0 cites·32 claims
- 2153US11742187B2RF capacitive coupled etch reactorEVATEC AG·Filed 2017·Granted Aug 29, 2023·0 cites·34 claims
- 2252US2022396864A1Vacuum process treatment chamber and method of treating a substrate by means of a vacuum treatment processEVATEC AG·Filed 2020·Application pending·0 cites
- 2351US12493016B2Measuring device and method for measuring parameters of a piezoelectric crystal onto which a thin film of material is deposited as well as thin-film deposition systems with such a device and a method for controlling such systemsEVATEC AG·Filed 2021·Granted Dec 9, 2025·0 cites·30 claims
- 2450US11476099B2Methods of and apparatus for magnetron sputteringEVATEC AG·Filed 2018·Granted Oct 18, 2022·0 cites·26 claims
- 2550US2023267760A1Biometric authentication systemEVATEC AG·Filed 2021·Application pending·0 cites
- 2648US2020230643A1Permeation-barrierEVATEC AG·Filed 2018·Application pending·0 cites
- 2748US2020216955A1Permeation-barrierEVATEC AG·Filed 2018·Application pending·0 cites
- 2848US2020203071A1Soft magnetic multilayer desposition apparatus, methods of manufacturing and magnetic multilayerEVATEC AG·Filed 2018·Application pending·0 cites
- 2947US11952654B2Liquid sputter targetEVATEC AG·Filed 2019·Granted Apr 9, 2024·0 cites·29 claims
- 3047US2024347326A1Process shutter arrangementEVATEC AG·Filed 2022·Application pending·0 cites
- 3145US12249523B2Wafer holder and temperature conditioning arrangement and method of manufacturing a waferEVATEC AG·Filed 2017·Granted Mar 11, 2025·0 cites·25 claims
- 3245US2017175247A1Sputtering source arrangement, sputtering system and method of manufacturing metal-coated plate-shaped substratesEVATEC AG·Filed 2014·Application pending·0 cites
- 3345US2017200695A1Apparatus and method for processing a substrateEVATEC AG·Filed 2017·Application pending·0 cites
- 3444US10301125B2Transport and handing-over arrangement for disc-shaped substrates, vacuum treatment installation and method for manufacture treated substratesEVATEC AG·Filed 2017·Granted May 28, 2019·0 cites·15 claims
- 3543US2023097276A1Apparatus and process with a dc-pulsed cathode arrayEVATEC AG·Filed 2021·Application pending·0 cites
- 3640US12426506B2Piezoelectric coating and deposition processEVATEC AG·Filed 2020·Granted Sep 23, 2025·0 cites·28 claims
- 3739US11380520B2RF power delivery to vacuum plasma processingEVATEC AG·Filed 2018·Granted Jul 5, 2022·0 cites·25 claims
- 3839US2019072228A1Adapter for vacuum-insulated linesEVATEC AG·Filed 2018·Application pending·0 cites
- 3938US11377728B2Broadband optical monitoringEVATEC AG·Filed 2017·Granted Jul 5, 2022·0 cites·11 claims
- 4038US2023234094A1Vacuum treatment apparatusEVATEC AG·Filed 2021·Application pending·0 cites
- 4137US2021348274A1Plasma enhanced atomic layer deposition (peald) apparatusEVATEC AG·Filed 2019·Application pending·0 cites
- 4237US2021202282A1Method and apparatus for treating a substrateEVATEC AG·Filed 2018·Application pending·0 cites
- 4337US2024068099A1Substrate processing apparatus for temperature measurement of a moving substrate and method of measuring the temperature of a moving substrateEVATEC AG·Filed 2022·Application pending·0 cites
- 4436US11145495B2Vacuum treatment chamber and method of manufacturing a vacuum treated plate-shaped substrateEVATEC AG·Filed 2017·Granted Oct 12, 2021·0 cites·20 claims
- 4535US12389797B2Deposition process for piezoelectric coatingsEVATEC AG·Filed 2019·Granted Aug 12, 2025·0 cites·20 claims
- 4635US2023002879A1Gas ring for a pvd sourceEVATEC AG·Filed 2020·Application pending·0 cites
- 4735US2021381100A1Vacuum treatment apparatus and method of vacuum treating substratesEVATEC AG·Filed 2019·Application pending·0 cites
- 4835US2021319984A1Method and aparatus for low particle plasma etchingEVATEC AG·Filed 2019·Application pending·0 cites
- 4934US2024063051A1Substrate support unit, and apparatus and method for depositing a layer using the sameEVATEC AG·Filed 2020·Application pending·0 cites
- 5033US12211715B2Substrate vacuum treatment apparatus and method thereforEVATEC AG·Filed 2019·Granted Jan 28, 2025·0 cites·30 claims
Showing the top 50 of 61 patent records by PatentIndex Score.
Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →