Adapter for vacuum-insulated lines

Abstract

A vacuum adapter for feeding-through vacuum-insulated coolant lines from the surrounding atmosphere into a vacuum processing installation has an intermediate volume which is connected firstly to at least one insulation intermediate space of the vacuum-insulated feed lines and secondly to a vacuum pump. The pump capacity is available at least temporarily for evacuating the insulation intermediate space around the coolant lines.

1 . Vacuum assembly structured to be connected to a vacuum room ( 1 ) and to coolant lines ( 11 ,  12 ,  22 ,  23 ) in vacuum-insulated feed lines ( 30 ,  31 ), the vacuum assembly comprising:
 an adapter ( 4 ) with an enclosure defining an intermediate volume ( 2 ), the intermediate volume ( 2 ) being configured to fluidly connect to an insulation intermediate space ( 32 ,  33 ) of the vacuum-insulated feed lines ( 30 ,  31 ),   sealing devices ( 13 ,  14 ) disposed at openings in a wall of the enclosure, the sealing devices ( 13 ,  14 ) being adapted to fluidly isolate the intermediate volume ( 2 ) from the vacuum room ( 1 ), wherein the sealing devices ( 13 ,  14 ) are configured to allow the coolant lines ( 11 ,  12 ) to extend through the sealing devices ( 13 ,  14 ), and   a pump neck ( 5 ) formed in the wall of the enclosure and configured to fluidly communicate with the intermediate volume ( 2 ), the pump neck being adapted to be connected with a vacuum pump ( 40 ).   
     
     
         2 . Vacuum assembly according to  claim 1 , wherein at least one of the sealing devices is a disc ( 13 ) made of a material that hinders heat conduction between the coolant lines ( 11 ,  12 ) and the wall. 
     
     
         3 . Vacuum assembly according to  claim 1 , wherein the enclosure includes a pressure sensor in the intermediate volume ( 2 ) that displays a drop in a pressure of the insulation intermediate space ( 32 ,  33 ). 
     
     
         4 . Vacuum assembly according to  claim 1 , wherein at least one of the sealing devices is a bushing ( 14 ) made of a material that hinders heat conduction between the coolant lines ( 11 ,  12 ) and the wall. 
     
     
         5 . Vacuum assembly according to  claim 1 , wherein the sealing devices ( 13 ,  14 ) are configured to provide a thermal barrier between the coolant lines ( 11 ,  12 ) and the wall of the enclosure by preventing a direct contact between the coolant lines ( 11 ,  12 ) and the wall of the enclosure. 
     
     
         6 . Vacuum processing installation with a vacuum room ( 1 ) and a vacuum assembly according to  claim 1 , wherein the vacuum assembly is connected to the vacuum room ( 1 ), to coolant lines ( 11 ,  12 ,  22 ,  23 ) in vacuum-insulated feed lines ( 30 ,  31 ) and to a vacuum pump. 
     
     
         7 . Vacuum processing installation according to  claim 6 , wherein each of the vacuum-insulated feed lines ( 30 ,  31 ) includes an outer sleeve ( 20 ,  21 ) in the form of a rigid or flexible conduit, a corrugated tube, an envelope or hose, and an inner coolant line ( 22 ,  23 ). 
     
     
         8 . Vacuum processing installation according to  claim 7 , further comprising flange connections ( 26 ,  27 ) for connecting the outer sleeves ( 20 ,  21 ) to the wall of the enclosure. 
     
     
         9 . Vacuum processing installation according to  claim 6 , wherein the vacuum assembly is mounted on a wall of the vacuum processing installation by means of wall connectors ( 6 ,  7 ). 
     
     
         10 . Vacuum processing installation according to  claim 6 , wherein the vacuum pump is a backing pump. 
     
     
         11 . Vacuum processing installation according to  claim 6 , wherein the vacuum assembly is integrated in a wall of the vacuum processing installation.