Assignee
FLAMM DANIEL L
US·6 granted patents·232 citations·filing 1991–2003
Top patents by PatentIndex Score
6 records- 0193US6127275AProcess depending on plasma discharges sustained by inductive couplingFLAMM DANIEL L·Filed 1999·Granted Oct 3, 2000·73 cites·1 claims
- 0281US5980766AProcess optimization in gas phase dry etchingFLAMM DANIEL L·Filed 1997·Granted Nov 9, 1999·36 cites·20 claims
- 0380US5304282AProcesses depending on plasma discharges sustained in a helical resonatorFLAMM DANIEL L·Filed 1991·Granted Apr 19, 1994·69 cites·18 claims
- 0476US6231776B1Multi-temperature processingFLAMM DANIEL L·Filed 1998·Granted May 15, 2001·24 cites·12 claims
- 0572US5711849AProcess optimization in gas phase dry etchingFLAMM DANIEL L·Filed 1995·Granted Jan 27, 1998·24 cites·29 claims
- 0669USRE40264EMulti-temperature processingFLAMM DANIEL L·Filed 2003·Granted Apr 29, 2008·6 cites·71 claims
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