Assignee
FUKUDA MUNEYUKI
JP·7 granted patents·1 pending application·43 citations·filing 2009–2012
Top patents by PatentIndex Score
8 records- 0192US8841612B2Charged particle beam microscopeFUKUDA MUNEYUKI·Filed 2011·Granted Sep 23, 2014·12 cites·5 claims
- 0287US8389935B2Charged particle beam apparatus permitting high-resolution and high-contrast observationFUKUDA MUNEYUKI·Filed 2009·Granted Mar 5, 2013·7 cites·12 claims
- 0384US8766183B2Charged particle beam deviceFUKUDA MUNEYUKI·Filed 2009·Granted Jul 1, 2014·8 cites·17 claims
- 0484US8431915B2Charged particle beam apparatus permitting high resolution and high-contrast observationFUKUDA MUNEYUKI·Filed 2012·Granted Apr 30, 2013·4 cites·13 claims
- 0582US8431893B2Electron beam apparatus and electron beam inspection methodFUKUDA MUNEYUKI·Filed 2012·Granted Apr 30, 2013·4 cites·2 claims
- 0681US8207498B2Electron beam apparatus and electron beam inspection methodFUKUDA MUNEYUKI·Filed 2011·Granted Jun 26, 2012·4 cites·2 claims
- 0779US9123501B2Device for correcting diffraction aberration of electron beamFUKUDA MUNEYUKI·Filed 2011·Granted Sep 1, 2015·4 cites·10 claims
- 0851US2012004879A1Charged particle apparatus, scanning electron microscope, and sample inspection methodFUKUDA MUNEYUKI·Filed 2011·Application pending·0 cites
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