Assignee
GUILLORN MICHAEL A
US·7 granted patents·1 pending application·186 citations·filing 2011–2012
Top patents by PatentIndex Score
8 records- 0198US8440523B1Micromechanical device and methods to fabricate same using hard mask resistant to structure release etchGUILLORN MICHAEL A·Filed 2011·Granted May 14, 2013·143 cites·16 claims
- 0294US8470628B2Methods to fabricate silicide micromechanical deviceGUILLORN MICHAEL A·Filed 2011·Granted Jun 25, 2013·11 cites·16 claims
- 0393US8771929B2Tone inversion of self-assembled self-aligned structuresGUILLORN MICHAEL A·Filed 2012·Granted Jul 8, 2014·13 cites·25 claims
- 0490US9059096B2Method to form silicide contact in trenchesGUILLORN MICHAEL A·Filed 2012·Granted Jun 16, 2015·11 cites·13 claims
- 0582US8921030B2Tone inversion of self-assembled self-aligned structuresGUILLORN MICHAEL A·Filed 2012·Granted Dec 30, 2014·4 cites·25 claims
- 0669US8610181B2V-groove source/drain MOSFET and process for fabricating sameGUILLORN MICHAEL A·Filed 2012·Granted Dec 17, 2013·2 cites·15 claims
- 0769US8603868B2V-groove source/drain MOSFET and process for fabricating sameGUILLORN MICHAEL A·Filed 2011·Granted Dec 10, 2013·2 cites·12 claims
- 0849US2013189839A1Method to form silicide contact in trenchesGUILLORN MICHAEL A·Filed 2012·Application pending·0 cites
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