Assignee
HEIDEN MICHAEL
DE·4 granted patents·3 pending applications·10 citations·filing 2006–2012
Top patents by PatentIndex Score
7 records- 0174US8305587B2Apparatus for the optical inspection of wafersHEIDEN MICHAEL·Filed 2010·Granted Nov 6, 2012·4 cites·15 claims
- 0270US8582113B2Device for determining the position of at least one structure on an object, use of an illumination apparatus with the device and use of protective gas with the deviceHEIDEN MICHAEL·Filed 2012·Granted Nov 12, 2013·3 cites·33 claims
- 0362US8390927B2Element for homogenizing the illumination with simultaneous setting of the polarization degreeHEIDEN MICHAEL·Filed 2008·Granted Mar 5, 2013·3 cites·4 claims
- 0448US2012033691A1Device for Determining the Position of at Least One Structure on an Object, Use of an Illumination Apparatus with the Device and Use of Protective Gas with the DeviceHEIDEN MICHAEL·Filed 2011·Application pending·0 cites
- 0548US2012033230A1Device for Determining the Position of at Least One Structure on an Object, Use of an Illumination Apparatus with the Device and Use of Protective Gas with the DeviceHEIDEN MICHAEL·Filed 2011·Application pending·0 cites
- 0641US8102541B2Apparatus and method for measuring structures on a mask and or for calculating structures in a photoresist resulting from the structuresHEIDEN MICHAEL·Filed 2008·Granted Jan 24, 2012·0 cites·23 claims
- 0739US2009225414A1Dark Field Objective for a MicroscopeHEIDEN MICHAEL·Filed 2006·Application pending·0 cites
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